Pulsed Light Wavelength Conversion With Diffraction Pointing Correction

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Solution Overview

Problem

Existing pulsed light generation devices face challenges in maintaining beam quality after wavelength conversion, particularly due to the change in pointing and frequency of the pulsed light, which leads to spatial and temporal distortions.

Innovation Solution

A pulsed light generation device comprising a nonlinear optical crystal for wavelength-converting first pulsed light into second pulsed light, and a diffraction grating positioned on the path of the second pulsed light to reduce the ratio of pointing change to frequency change, thereby correcting spatial and temporal distortions and improving beam quality.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Use of energy by moving object

If wavelength conversion is performed using a nonlinear optical crystal, then the wavelength of pulsed light is changed, but spatial and temporal distortions occur due to pointing change and frequency change

Engineering Contradiction:
Improvewavelength conversion efficiencyVSAvoidbeam quality
Core Design Contradiction:
Use of energy by moving objectVSManufacturing precision

Solution Approach 1:

A diffraction grating is introduced as an intermediary component between the nonlinear optical crystal and the workpiece. The grating disperses the wavelength-converted light and selectively directs frequency components, acting as a mediator that corrects the spatial and temporal distortions introduced during wavelength conversion while preserving the wavelength transformation benefit

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The system changes the angular parameter of the light beam by utilizing the diffraction grating's ability to disperse light at different angles based on frequency. This parameter change in propagation angle compensates for the pointing instability and frequency chirp introduced during nonlinear wavelength conversion, thereby restoring beam quality

Inventive Principle:
Principle #35Parameter changes

2Manufacturing precision

If the diffraction grating is used to correct pointing change, then beam quality is improved, but the device complexity increases

Engineering Contradiction:
Improvebeam qualityVSAvoidoptical system complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The diffraction grating performs multiple functions simultaneously: it disperses the wavelength-converted light to correct temporal distortions (frequency chirp), redirects the beam to correct spatial pointing changes, and enables spectral filtering. This multi-functionality allows a single component to address multiple quality issues without proportionally increasing system complexity

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The proposed solution effectively corrects spatial and temporal distortions in the pulsed light, resulting in improved beam quality and enhanced processing accuracy when irradiating a workpiece.

Implementation Method 1

a nonlinear optical crystal configured to cause first pulsed light emitted from a pulsed light source to enter, and to emit second pulsed light obtained by wavelength-converting the first pulsed light

Methodology Applied
Scientific EffectWavelength conversion: Second Harmonic Generation

Implementation Method 2

a diffraction grating that is disposed on an advancing path of the second pulsed light emitted from the nonlinear optical crystal and that is configured to emit third pulsed light obtained by reducing a ratio of an amount of change in pointing with respect to an amount of change in frequency

Methodology Applied
Scientific EffectDiffraction: Diffraction

Data Source

PatentUS20250020969A1Pulsed light generation device, pulsed light generation method, and processing device
Publication Date: 2025.01.16 NIKON CORP
  • US20250020969A1 patent drawing
  • US20250020969A1 patent drawing
  • US20250020969A1 patent drawing

AI summary

A pulsed light generation device includes a nonlinear optical crystal configured to cause first pulsed light emitted from a pulsed light source to enter, and to emit second pulsed light obtained by wavelength-converting the first pulsed light, and a diffraction grating that is disposed on an advancing path of the second pulsed light emitted from the nonlinear optical crystal and that is configured to emit third pulsed light obtained by reducing a ratio of an amount of change in pointing with respect to an amount of change in frequency of the entered pulsed light.