Pulsed Light Beam Spectral Feature Control via Saturation Prevention
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing optical systems struggle to accurately control the spectral features of pulsed light beams, particularly in deep ultraviolet lithography, due to disturbances that cause saturation issues in actuatable apparatuses, leading to inadequate control of feature sizes on semiconductor substrates.
Innovation Solution
A system comprising multiple actuation modules and a control system that adjusts the spectral features of pulsed light beams by monitoring the operating state of actuatable apparatuses, desaturating them when saturated, and fine-tuning spectral bandwidth and wavelength through relative timing and optical magnification adjustments.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a single actuation module is used to control spectral features, then the device complexity is reduced, but the control precision deteriorates due to saturation issues
Solution Approach 1:
The control system is divided into multiple independent actuation modules, each responsible for controlling different spectral features (wavelength, bandwidth, pulse duration) through separate actuatable apparatus. This segmentation allows each module to operate within its optimal range without saturation, thereby improving overall control precision while managing device complexity through modular architecture.
Solution Approach 2:
The patent transitions from single-parameter control to multi-dimensional spectral control by introducing multiple actuation modules that simultaneously control different spectral parameters (wavelength, bandwidth, pulse duration). This dimensional expansion enables precise control of spectral features that cannot be achieved with a single actuator, resolving the contradiction between control precision and device complexity.
2Adaptability or versatility
If actuatable apparatus operate at full range, then the spectral feature adjustment capability is maximized, but saturation occurs leading to loss of control
Solution Approach 1:
The control system incorporates feedback mechanisms that continuously monitor the operating state of each actuation module and adjust their operation to prevent saturation. This feedback control allows the system to maintain full spectral adjustment capability while ensuring reliable operation by keeping actuatable apparatus within their linear control ranges.
Solution Approach 2:
The system dynamically adjusts the operating points of multiple actuatable apparatus based on real-time conditions and interdependencies between spectral parameters. This dynamic control prevents any single actuator from saturating while maintaining the full range of spectral feature adjustment capability, thereby preserving both adaptability and reliability.
3Manufacturing precision
If multiple actuation modules are used to control different spectral parameters, then the spectral feature control precision is improved, but the device complexity increases
Solution Approach 1:
The control system is designed with universal control architecture where multiple actuation modules share common control resources, communication protocols, and integration interfaces. This multi-functionality approach allows precise control of multiple spectral parameters (wavelength, bandwidth, pulse duration) while managing device complexity through standardized modular design that can be scaled based on specific application requirements.
Data Source
AI summary
A system includes a first actuation module coupled to a first actuatable apparatus of an optical source, the first actuatable apparatus being altered by the first actuation module to adjust the spectral feature of the pulsed light beam; a second actuation module coupled to a second actuatable apparatus of the optical source, the second actuatable apparatus being altered by the second actuation module to adjust the spectral feature of the pulsed light beam; and a control system configured to receive an indication regarding the operating state of the first actuatable apparatus; and send a signal to the second actuation module to adjust the spectral feature of the pulsed light beam to either: prevent the first actuatable apparatus from saturating based on the operating state of the first actuatable apparatus, or desaturate the first actuatable apparatus if the first actuatable apparatus is saturated.