Pulsed Non-Thermal Plasma System for Low-Temperature Surface Treatment

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Solution Overview

Problem

Thermal atmospheric-pressure plasmas are limited in their utility due to high temperatures, which restrict their application to materials that can withstand these temperatures, limiting the applicability of atmospheric plasma treatments.

Innovation Solution

A system generating a wide beam of non-thermal, low-temperature (below 50°C) partially ionized plasma using repetitive, fast rising high voltage electrical pulses and a directed high-speed gas flow, where the energy is primarily absorbed by electrons, minimizing waste heat and allowing for tunable plasma properties.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If thermal atmospheric-pressure plasma is used for cleaning, coating, cutting and joining applications, then effective surface treatments can be achieved, but the high temperatures limit utility to materials that can withstand those temperatures

Engineering Contradiction:
Improveeffectiveness of surface treatmentVSAvoidapplicability to different materials
Core Design Contradiction:
ReliabilityVSAdaptability or versatility

Solution Approach 1:

The patent changes the fundamental parameter of plasma temperature by using pulsed voltage (e.g., 10 kV pulses at 1 kHz repetition rate) instead of continuous AC power, creating non-thermal plasma with electron temperatures much higher than gas temperature. This allows effective plasma chemistry while maintaining low bulk gas temperature (near room temperature), enabling treatment of temperature-sensitive materials

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent employs periodic pulsed voltage applied to the plasma generator instead of continuous power delivery. The pulsed nature (e.g., nanosecond to microsecond duration pulses with specific repetition rates) creates non-equilibrium plasma conditions where energy is deposited in bursts, allowing control over plasma chemistry while limiting thermal accumulation, thus treating materials that cannot withstand continuous high temperatures

Inventive Principle:
Principle #19Periodic action

2Temperature

If fast rising high voltage pulses are used to generate non-thermal plasma, then low temperature plasma can be achieved, but the system complexity increases

Engineering Contradiction:
Improveplasma temperatureVSAvoidsystem complexity
Core Design Contradiction:
TemperatureVSDevice complexity

Solution Approach 1:

The patent introduces a pulsed voltage generator as an intermediary device between the power source and plasma electrode, along with a flow controller for the carrier gas. These intermediary components enable precise control over plasma parameters (voltage amplitude, pulse width, repetition rate, gas flow rate) to achieve non-thermal plasma conditions while maintaining manageable system complexity through modular design

Inventive Principle:
Principle #24Intermediary (Mediator)

3Adaptability or versatility

If pulse voltage and repetition rate are adjusted to tune plasma properties, then plasma performance can be optimized for specific applications, but the control complexity increases

Engineering Contradiction:
Improvetunability of plasma propertiesVSAvoidoperational simplicity
Core Design Contradiction:
Adaptability or versatilityVSEase of operation

Solution Approach 1:

The patent incorporates feedback control mechanisms where plasma parameters (such as active species density, temperature, or treatment effectiveness) are monitored and used to automatically adjust pulse voltage amplitude, repetition rate, or gas flow rate. This feedback loop enables automatic optimization of plasma performance for different applications while simplifying user operation, as the system self-regulates to maintain optimal conditions

Inventive Principle:
Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables new chemical pathways in atmospheric pressure plasma treatment, optimizing plasma performance for specific applications by adjusting voltage, pulse repetition rate, and gas flow, achieving effective surface treatments like cleaning, activation, and coating without thermal damage.

Implementation Method 1

repetitive, fast rising (greater than 100 V/ns), short duration (less than 100 nanoseconds), high voltage electrical pulses... The pulses are applied to the moving stream of gas via electrodes located at the plasma head to generate a wide beam of near-room temperature plasma

Methodology Applied
Scientific EffectElectrical ionization: Ionisation

Implementation Method 2

a directed, high speed flow of gas... A source (e.g., fan, blower, compressor, reservoir of compressed gas) provides a moving stream of gas

Methodology Applied
Scientific EffectGas flow: Jet

Data Source

PatentUS11696388B2Pulsed non-thermal atmospheric pressure plasma processing system
Publication Date: 2023.07.04 TRANSIENT PLASMA SYST
  • US11696388B2 patent drawing
  • US11696388B2 patent drawing
  • US11696388B2 patent drawing

AI summary

A system for generating and delivering a low temperature, wide, partially ionized tunable plasma stream is described. The system employs a fast rising, repetitive high voltage pulse generator, flowing gas, and a plasma head to produce the described atmospheric pressure plasma stream and its associated active species. The plasma head may have an exit slit with a relatively wide dimension to produce a relative wide plasma stream. Electrodes may be located proximate the exit slit, for example one in an interior of the plasma head via with gas flows toward the exit slit, and the other exterior to the plasma head and offset from the exit slit. The plasma may include baffle material to enhance a uniformity of flow through and across the exit slit. Plasma heads with having exit slit with different widths may be provided as a kit.