Pump Apparatus Vertical Stacked Configuration for Air Bubble Venting
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Solution Overview
Problem
Existing pump apparatus designs with upstream and downstream pumps in parallel horizontal configuration fail to effectively vent air bubbles from the processing liquid, leading to undesirable air bubbles being supplied to substrates during processing.
Innovation Solution
The pump apparatus is configured with the upstream pump, filter, and downstream pump inserted in sequence, where the downstream pump has an inlet higher than the outlets of both the upstream pump and filter, allowing air bubbles to rise and be collected, and includes features like a vent for midstream air bubble removal and a return path to recirculate air-containing liquid for re-filtering.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If the upstream pump and downstream pump are disposed in parallel in the horizontal direction, then the pump apparatus structure is simple, but air bubbles are less likely to be vented from the pump apparatus
Solution Approach 1:
The patent transitions from a horizontal parallel arrangement to a vertical stacked arrangement of pumps and filter. The downstream pump is positioned higher than the upstream pump and filter, creating a vertical flow path that enables air bubbles to rise and be vented through gravity and buoyancy, thus solving the venting problem while maintaining structural compactness.
Solution Approach 2:
The patent introduces asymmetric vertical positioning where the downstream pump inlet is higher than the upstream pump outlet and filter outlet. This asymmetric height difference creates a unidirectional upward flow path that prevents air bubble accumulation, contrasting with the symmetric horizontal arrangement of conventional designs.
2Volume of moving object
If the processing liquid pipe is directed downward at a portion, then the liquid flow path is compact, but air bubbles are less likely to be vented at that portion
Solution Approach 1:
Instead of directing the processing liquid pipe downward as in conventional designs, the patent inverts the flow direction by positioning the downstream pump higher than the filter outlet. This causes the liquid to flow upward from the filter to the downstream pump, enabling air bubbles to naturally rise and be vented, thus solving the venting problem while maintaining path compactness.
3Duration of action of stationary object
If air bubbles are not vented properly, then the pump apparatus operates continuously, but processing liquid with air bubbles is supplied to the substrate
Solution Approach 1:
The patent implements preliminary air bubble venting by designing the downstream pump inlet to be positioned higher than the filter outlet. This preliminary elevation difference creates a venting zone where air bubbles are removed from the liquid before it enters the downstream pump and is supplied to the substrate, ensuring liquid quality while maintaining continuous operation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration ensures that air bubbles are readily vented from the processing liquid flow path, reducing their presence in the supply path and enhancing the reliability of substrate processing by preventing air bubble contamination.
Implementation Method 1
Even when air bubbles are generated in the processing liquid, buoyancy causes the air bubbles to move upward and collect the air bubbles on a downstream side.
Data Source
AI summary
Provided is a pump apparatus, having an upstream pump, a filter, and a downstream pump being inserted into a processing liquid flow path in this order. The downstream pump has an inlet higher in level than an outlet of the upstream pump and higher in level than an outlet of the filter. That is, the downstream pump is disposed higher in level than the upstream pump and the filter. Accordingly, this allows a processing liquid to flow upward. Even when air bubbles are generated in the processing liquid, buoyancy causes the air bubbles to move upward in the processing liquid flow path and collect the air bubbles on a downstream side. Consequently, the air bubbles are readily vented from the processing liquid flow path.