Turbomolecular Pump Cooling Mechanism Integration

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Solution Overview

Problem

Conventional turbomolecular pumps require separate cooling mechanisms for the main unit and control device, leading to increased complexity, labor, and reduced cooling efficiency due to separate panels and integration challenges, which hinder cost reduction and simplify operations.

Innovation Solution

Integration of the turbomolecular pump main unit and control device with a cooling mechanism that serves as a single panel, allowing the cooling mechanism to directly contact and cool both units, reducing the number of components and enabling independent assembly of the turbomolecular pump main unit.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the turbomolecular pump main unit and control device are structured separately with separate cooling mechanisms, then each unit can be cooled independently, but the device complexity increases and requires more components

Engineering Contradiction:
Improvecooling reliabilityVSAvoiddevice complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent merges the cooling mechanism with the control device case, making the control device case itself serve as the cooling mechanism housing. This integration eliminates the need for a separate cooling mechanism structure, reducing device complexity while maintaining the cooling function through direct thermal contact between the turbomolecular pump main unit and the control device case.

Inventive Principle:
Principle #5Merging (Combining)

2Device complexity

If the cooling mechanism is integrated with the control device, then the number of components is reduced, but two panels are required at the contact surface increasing complexity

Engineering Contradiction:
Improvenumber of componentsVSAvoidease of manufacture
Core Design Contradiction:
Device complexityVSEase of manufacture

Solution Approach 1:

The control device case is designed to serve multiple functions simultaneously: it houses the control device components and acts as the cooling mechanism housing. This multi-functionality eliminates the need for separate panels at the contact surface, as the case itself provides both structural and cooling functions, simplifying manufacturing.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Ease of operation

If the turbomolecular pump main unit requires periodic overhaul, then maintenance is necessary, but integration with control device increases disassembly work

Engineering Contradiction:
Improveease of overhaulVSAvoiddisassembly complexity
Core Design Contradiction:
Ease of operationVSDevice complexity

Solution Approach 1:

The patent designs the integrated structure with separable connections between the turbomolecular pump main unit and the control device case. This segmentation allows the turbomolecular pump main unit to be removed for overhaul without damaging the control device case, reducing disassembly complexity while maintaining integration benefits during normal operation.

Inventive Principle:
Principle #1Segmentation

4Device complexity

If cooling is performed through the control device case rather than direct component contact, then structural simplicity is achieved, but cooling efficiency decreases

Engineering Contradiction:
Improvestructural simplicityVSAvoidcooling efficiency
Core Design Contradiction:
Device complexityVSLoss of energy

Solution Approach 1:

The control device case acts as an intermediary thermal conductor between the turbomolecular pump main unit and the external environment. The case is designed with appropriate thermal conductivity and heat dissipation structures to efficiently transfer heat from the pump unit while maintaining structural simplicity, balancing cooling efficiency with design simplicity.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This integration reduces the number of components, simplifies overhauls, and enhances cooling efficiency by directly cooling components within the control device, facilitating cost reductions and maintaining assembly processes for both separate and integrated turbomolecular pump devices.

Implementation Method 1

the cooling mechanism for cooling the turbomolecular pump main unit and the control device is provided between the turbomolecular pump main unit and the control device

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentUS8613604B2Turbomolecular pump
Publication Date: 2013.12.24 SHIMADZU CORP
  • US8613604B2 patent drawing
  • US8613604B2 patent drawing
  • US8613604B2 patent drawing

AI summary

The provision of the components requiring cooling on top of the cooling mechanism enables the cooling efficiency to be increased. Furthermore, a case of a control device is attached to the cooling mechanism whereon the components requiring cooling are disposed. The cooling mechanism fulfills the role of the contact surface of the case of the control device with the turbomolecular pump main unit, where the case does not have a case panel on the contact surface with the turbomolecular pump main unit. The cooling mechanism fulfills the role of one surface of the case for the control device, where the cooling mechanism is structured integrally with the control device. Additionally, the turbomolecular pump main unit, the cooling mechanism, and the control device are structured integrally by the turbomolecular pump main unit and the cooling mechanism being in contact.