Turbomolecular Pump Covers for Hot Casing Safety and Gas Buildup
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Solution Overview
Problem
Existing turbomolecular pumps lack sufficient safety measures to prevent users from coming into contact with high-temperature portions and fail to effectively manage temperature fluctuations that can lead to the accumulation of solidified process gas, which degrades pump performance.
Innovation Solution
The vacuum pump incorporates a side surface cover and an outlet port cover, both made of thin plate-shaped stainless steel, which are detachable and attachable, along with a heater and water-cooled components to manage temperature and prevent direct contact with high-temperature areas, and a Holweck type exhaust mechanism to direct exhaust gas efficiently.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the casing is heated to high temperature to prevent solidified process gas accumulation, then pump performance is maintained, but user safety is compromised due to risk of contact with high-temperature portions
Solution Approach 1:
The cover is divided into a heat-resistant portion (contacting the heated casing) and a heat-insulating portion (facing the user). This segmentation allows different parts of the same component to serve different functions: maintaining thermal contact for performance while providing thermal protection for safety.
Solution Approach 2:
The cover acts as an intermediary component between the heated casing and the user. It physically separates the user from the high-temperature surface while maintaining the necessary heating function, thus mediating between performance requirements and safety concerns.
2Object-affected harmful factors
If a solid cover is used to protect against high-temperature portions, then user safety is improved, but heat transmission to the cover occurs, potentially causing overheating and solidified gas accumulation
Solution Approach 1:
The cover is designed with non-uniform thermal properties: the heat-resistant portion has high thermal conductivity to maintain contact with the heated casing, while the heat-insulating portion has low thermal conductivity to protect the user. This local differentiation of material properties resolves the contradiction between safety and performance.
3Ease of operation
If the cover is made detachable for ease of maintenance, then ease of operation is improved, but device complexity increases due to additional attachment/detachment mechanisms
Solution Approach 1:
The cover is segmented into two portions that can be easily attached and detached from each other and from the casing. This segmentation enables simple maintenance procedures while keeping the attachment mechanism straightforward, balancing ease of operation with device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances safety by preventing direct contact with high-temperature components and reduces the accumulation of solidified process gas, thereby improving the pump's performance and reliability.
Implementation Method 1
a heating means for causing a portion of at least the casing to have a high temperature
Implementation Method 2
water-cooled components to manage temperature
Data Source
Figure 1
Figure 2
Figure 3~4
AI summary
A vacuum pump capable of further improving safety is provided. A turbomolecular pump 100 includes: a casing 215 including at least an outlet port 133 from among an inlet port 101 and the outlet port 133; a heater 148 configured to cause a portion of at least the casing 215 to have a high temperature from among the casing 215 and the outlet port 133. The turbomolecular pump 100 includes a side surface cover 224 that covers the side surface of the casing 215, the side surface cover having an annular shape and a thin plate shape, and an outlet port cover 222 that covers a surrounding of the outlet port 133, the outlet port cover having a thin plate shape. The outlet port cover 222 and the side surface cover 224 are separate components and is attachable and detachable, with the side surface cover 224 being attached.