Multi-Stage Pump with Single-Piece Dispense Block
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Solution Overview
Problem
Current multi-stage pumps in semiconductor processing face challenges with sharp pressure spikes, fluid leakage, and complex designs that damage photochemicals and complicate maintenance, leading to inefficient and costly operations.
Innovation Solution
A multi-stage pump with a reduced form factor, featuring rolling diaphragms, a single piece dispense block, and integrated flow paths, which reduces hydraulic components, minimizes fluid usage, and enhances reliability, using stepper and brushless DC motors for precise control and gentler fluid handling.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If traditional multi-stage pumps are used with flat diaphragms and external metal plates, then sufficient displacement volume can be achieved, but the pump size increases and fluid leakage risk increases
Solution Approach 1:
The patent merges the feed chamber and dispense chamber into a single integrated pump chamber, eliminating the need for separate chambers and external metal plates. This consolidation reduces the overall pump size while maintaining the required displacement volume through optimized internal geometry and flow paths.
Solution Approach 2:
The patent implements a nested structure where the rolling diaphragm is positioned within the pump chamber, and the motor is integrated into the same housing. This nesting approach allows compact arrangement of components, reducing the pump's external dimensions while preserving internal functional volumes.
2Ease of operation
If traditional multi-stage pumps with distributed valves are used, then fluid flow control is achieved, but maintenance difficulty increases
Solution Approach 1:
The patent combines multiple valve functions into a single integrated valve assembly that is accessible through one maintenance port. This consolidation allows all valve components to be serviced simultaneously through a single access point, dramatically simplifying maintenance procedures while maintaining precise fluid flow control capabilities.
3Stress or pressure
If traditional pumps with multiple hydraulic components are used, then sufficient pressure control is achieved, but system complexity increases
Solution Approach 1:
The patent extracts and eliminates unnecessary hydraulic components from the system. By using a simplified single-chamber design with integrated flow control, the patent removes redundant hydraulic circuits while maintaining adequate pressure control through optimized diaphragm mechanics and direct motor coupling.
Solution Approach 2:
The rolling diaphragm design inherently provides pressure regulation through its mechanical properties, eliminating the need for complex external pressure control systems. The diaphragm's elasticity and geometry automatically compensate for pressure variations, reducing system complexity.
4Quantity of substance
If traditional pumps with flat diaphragms are used, then displacement volume is sufficient, but pressure spikes occur that damage fluid
Solution Approach 1:
The patent replaces flat diaphragms with rolling diaphragms that have a curved, spherical surface geometry. This curvature allows the diaphragm to roll during actuation, creating a gradual pressure increase rather than abrupt spikes. The rolling motion distributes the displacement action over time, maintaining sufficient volume transfer while protecting sensitive photochemical fluids from pressure damage.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution results in a smaller, more reliable pump with reduced maintenance needs, lower chemical usage, and improved precision, offering increased uptime, cost savings, and better control over fluid dispensing, while preventing damage to sensitive chemicals.
Implementation Method 1
a rolling diaphragm movable in a dispense chamber, a piston to move the diaphragm and a motor coupled to the piston to reciprocate the piston
Implementation Method 2
a feed stage diaphragm movable in a feed chamber, a piston to move the feed stage diaphragm and a motor coupled to the piston to reciprocate the piston
Data Source
Figure 1~2
Figure 3
Figure 4A
AI summary
A multi-stage pump comprises a feed pump (150) having a feed chamber (155) and a dispense pump (180) having a dispense chamber (185). A dispense block (205), which is formed of a single piece of material, defines: at least a portion of the feed chamber (155); at least a portion of the dispense chamber (185); a pump inlet flow path (280); a feed stage outlet flow path (285); a dispense stage inlet flow path (290); a vent flow path; a purge flow path (300, 305); at least a portion of a pump outlet flow path (295); and a portion of each valve of a set of valves (125, 130, 135, 140, 145) to selectively allow fluid flow through the multi-stage pump. A manufacturing method of said multi-stage pump is also disclosed.