Vacuum Pump Oil Backflow Prevention via Atmospheric Valve Extraction

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Solution Overview

Problem

Existing oil-sealed rotary vacuum pumps face issues with lubricating oil backflow into the vacuum chamber when stopped, contaminating vacuum piping and vessels, and require complex control systems and additional space for shut-off and air introduction valves.

Innovation Solution

A pump design incorporating a non-return valve and air introduction valve that uses pressure differences to prevent lubricating oil backflow, eliminating the need for a vacuum-controlled control system and simplifying the configuration by interlocking the hydraulic pump with the pump body.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a shut-off valve and air introduction valve are added to prevent oil backflow, then oil backflow prevention is improved, but device complexity and space requirements increase

Engineering Contradiction:
Improveoil backflow preventionVSAvoidcontrol system complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The invention extracts the valve control function from the vacuum environment and relocates it to the atmospheric environment. The non-return valve is positioned in the atmospheric side of the system, eliminating the need for vacuum-compatible valves and control systems. This separation allows standard atmospheric valves to be used, reducing complexity while maintaining oil backflow prevention.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The non-return valve acts as an intermediary element between the vacuum chamber and atmospheric environment. It selectively allows air passage during pumping operations while blocking oil backflow when the pump stops, thereby preventing contamination without requiring complex control mechanisms in the vacuum system.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Reliability

If shut-off valves are installed to prevent oil backflow, then oil backflow prevention is improved, but installation space requirements increase

Engineering Contradiction:
Improveoil backflow preventionVSAvoidvalve installation space
Core Design Contradiction:
ReliabilityVSArea of stationary object

Solution Approach 1:

The control valves are extracted from the vacuum chamber installation space and relocated to the atmospheric side. The non-return valve is installed in the air supply line outside the vacuum environment, eliminating the need for dedicated valve space within the vacuum chamber and reducing overall installation footprint.

Inventive Principle:
Principle #2Taking out (Extraction)

3Reliability

If a complex control system is used to manage valves under vacuum, then oil backflow prevention is improved, but manufacturing costs increase

Engineering Contradiction:
Improveoil backflow preventionVSAvoidmanufacturing cost
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The control system is extracted from the vacuum environment and relocated to atmospheric conditions. Standard atmospheric valves and control mechanisms can be used, which are less expensive to manufacture and install compared to vacuum-compatible components. This eliminates the need for costly vacuum-sealed valve assemblies and complex control wiring.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The invention uses simple, inexpensive non-return valve mechanisms that can be manufactured with basic materials. These valves operate passively using pressure differential, eliminating the need for expensive motorized actuators, sensors, and control electronics that would increase manufacturing costs.

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Effectively prevents lubricating oil from flowing into the upstream side, reducing contamination and space requirements, and simplifies the control system, lowering development and production costs.

Implementation Method 1

a non-return valve which is disposed in a flow path between the inlet and the pump body to open and close the inlet; an air introduction path which introduces a gas having a higher pressure than a vacuum into the non-return valve

Methodology Applied
Scientific EffectPressure difference: Pressure Gradient

Implementation Method 2

a hydraulic pump which pressure-feeds a lubricating oil to the pump body in accordance with the driving of the pump body

Methodology Applied
Scientific EffectHydraulic pressure: Hydraulic Press

Data Source

PatentEP2530325B1pump
Publication Date: 2018.10.17 ULVAC KIKO
  • EP2530325B1 patent drawingFigure 1
  • EP2530325B1 patent drawingFigure 2
  • EP2530325B1 patent drawingFigure 3(a)~3(c)

AI summary

A pump comprises: a pump body 10 which sucks in air from an inlet 7 and discharges the air; a hydraulic pump which pressure-feeds a lubricating oil to the pump body 10 in accordance with the driving of the pump body 10; a non-return valve 70 which is disposed in a valve accommodation portion 6 between the inlet 7 and the pump body 10 to open and close the valve accommodation portion 6; an air introduction path 19 which introduces air into a cylinder 74 of the non-return valve 70; and an air introduction valve 60 which opens the air introduction path 19 when the hydraulic pump is not operating. When the pump body 10 is stopped, the non-return valve 70 closes the inlet 7 in response to a difference in pressure between the pressure of the valve accommodation portion 6 reduced to a value equal to or less than atmospheric pressure by the operation of the pump body 10, and the pressure of the air introduced into the cylinder 74 by the opening of the air introduction valve 60 owing to the stoppage of the hydraulic pump associated with the stoppage of the pump body 10.