Turbo-molecular Pump Power Supply Dew Condensation Control
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Solution Overview
Problem
Turbo-molecular pump devices face dew condensation issues in their power supply units, leading to potential malfunctions due to temperature differences, and existing solutions require stopping the vacuum pump operation to address this problem.
Innovation Solution
Incorporating a dew condensation detector and a regenerative braking resistance within the power supply unit, which is energized to heat the area and a coolant switcher to manage coolant flow, allowing dew condensation elimination without stopping the pump's operation by controlling the coolant flow and temperature.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If water cooling is used to cool the power supply device, then the power supply device can be cooled effectively, but dew condensation occurs inside the power supply device
Solution Approach 1:
The invention converts the harmful effect of the cooling system into a beneficial one by using the coolant not only for cooling but also for preventing dew condensation. The coolant flow is controlled to create a protective atmosphere inside the power supply device housing that prevents moisture condensation, thus turning the cooling function into a dual-purpose system that both cools and protects against dew condensation.
Solution Approach 2:
The invention changes the parameters of the cooling system by introducing controllable coolant flow rates and temperature control. By adjusting the coolant flow rate and temperature, the system can optimize both cooling efficiency and dew condensation prevention, transforming a static cooling system into a dynamically adjustable one that responds to different operational conditions.
2Object-affected harmful factors
If the coolant water valve is closed to stop coolant water flow and eliminate dew condensation, then dew condensation is eliminated, but the vacuum pump operation must be stopped
Solution Approach 1:
The invention introduces dynamic control of the coolant flow system, allowing the coolant flow rate and temperature to be adjusted in real-time based on operational conditions. This dynamic control enables the system to prevent dew condensation while maintaining continuous vacuum pump operation, unlike static systems that require complete shutdown. The coolant pump and valve system provides continuous adjustable control rather than binary on/off states.
Solution Approach 2:
The invention changes the operational parameters of the cooling system by introducing variable coolant flow rates and temperature control. By adjusting these parameters, the system can maintain optimal conditions for preventing dew condensation while allowing the vacuum pump to continue operating, thus resolving the contradiction between dew condensation elimination and operational continuity.
3Temperature
If the power supply device is cooled by a cooling jacket, then the power supply device is maintained at relatively-low temperature, but the temperature becomes lower than ambient dew-point temperature causing dew condensation
Solution Approach 1:
The invention changes the temperature parameter control by introducing a regulated coolant temperature system. Instead of simply cooling the power supply device to low temperatures, the system adjusts the coolant temperature to maintain it above the dew-point temperature while still providing effective cooling. This parameter adjustment prevents dew condensation while maintaining adequate cooling performance.
Solution Approach 2:
The invention implements feedback control by monitoring the temperature inside the power supply device housing and adjusting the coolant flow rate and temperature accordingly. This feedback mechanism ensures that the internal temperature remains above the dew-point temperature while still providing effective cooling, thus preventing dew condensation. The system continuously adjusts based on actual conditions rather than operating with fixed parameters.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Effectively eliminates dew condensation in the power supply unit of turbo-molecular pump devices without halting the vacuum pump's operation, minimizing cooling interference with the pump main body and preventing malfunctions.
Implementation Method 1
the controller energizes the regenerative braking resistance to heat an inside of the power supply device
Implementation Method 2
the power supply device itself is cooled by a cooling jacket
Implementation Method 3
a dew condensation detector configured to detect dew condensation
Data Source
AI summary
A vacuum pump device comprises: a power supply device including a dew condensation detector configured to detect dew condensation, a regenerative braking resistance, and a controller configured to energize the regenerative braking resistance; a cooling system using coolant; and a pump main body including a motor rotatably driven by the power supply device. When the dew condensation detector detects the dew condensation, the controller energizes the regenerative braking resistance to heat an inside of the power supply device.