Pump Pressure Compensation via Closed-Loop Motor Control
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Solution Overview
Problem
Multi-stage pumps in semiconductor manufacturing experience pressure drift issues, leading to sharp pressure spikes and fluid dynamics problems, which can damage chemicals and result in uneven dispensing, wasting expensive photochemicals.
Innovation Solution
A closed-loop control system is implemented to monitor and maintain baseline pressure in the dispense chamber by adjusting the dispense motor, ensuring that pressure variations are corrected before fluid dispensing, using a combination of pressure sensors and motor control to regulate the pumping process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a multi-stage pump is used to dispense photochemicals, then the pumping capability and fluid delivery are improved, but pressure spikes and pressure drift occur causing fluid damage and dispensing inaccuracies
Solution Approach 1:
The system performs preliminary actions by monitoring pressure continuously and making compensatory motor adjustments before pressure spikes can damage the fluid or cause dispensing errors. The pressure compensation occurs proactively during the ready segment, maintaining baseline pressure before the dispense operation begins.
Solution Approach 2:
The system implements feedback control by continuously monitoring pressure in the dispense chamber and using this information to adjust the dispense motor position. The controller compares actual pressure readings with the desired baseline pressure and makes real-time adjustments to compensate for pressure drift, ensuring stable pressure throughout the dispensing process.
2Reliability
If pressure compensation control is added to maintain baseline pressure, then pressure stability and dispensing accuracy are improved, but system complexity increases
Solution Approach 1:
The dispense motor serves multiple functions: it performs the primary dispense operation and simultaneously functions as a pressure compensation actuator. By controlling the motor position during the ready segment, the system compensates for pressure drift without requiring a separate compensation mechanism, thereby reducing overall system complexity while maintaining pressure stability.
Solution Approach 2:
The system uses its existing components (dispense motor, pressure sensor, and controller) to perform pressure compensation autonomously. The controller automatically adjusts the motor position based on pressure feedback without requiring external intervention or additional complex control systems, enabling the pump to self-correct pressure drift.
3Manufacturing precision
If the dispense motor is controlled to maintain baseline pressure during ready segment, then pressure drift is compensated and dispensing accuracy is improved, but the operation time increases due to additional control cycles
Solution Approach 1:
The pressure monitoring and compensation occur continuously during the ready segment without interrupting the overall dispensing workflow. The control cycles operate in parallel with the normal pump operation, maintaining pressure stability while preparing for dispense, thereby minimizing additional time expenditure while ensuring dispensing accuracy.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution effectively maintains consistent pressure, preventing damage to chemicals, ensuring accurate and repeatable dispensing, and reducing waste by minimizing pressure spikes and fluid dynamics issues, thus enhancing the efficiency and reliability of the dispensing process.
Implementation Method 1
based on a pressure sensed in the dispense chamber
Implementation Method 2
the movement of the pumping means regulated to maintain substantially the desired pressure
Data Source
AI summary
Systems and methods for maintaining substantially a baseline pressure in a chamber of a pumping apparatus are disclosed. Embodiments of the present invention may serve to control a motor to compensate or account for a pressure drift which may occur in a chamber of the pumping apparatus. More specifically, a dispense motor may be controlled to substantially maintain a baseline pressure in the dispense chamber before a dispense based on a pressure sensed in the dispense chamber. In one embodiment, before a dispense is initiated a control loop may be utilized such that it is repeatedly determined if the pressure in the dispense chamber is above a desired pressure and, if so, the movement of the pumping means regulated to maintain substantially the desired pressure in the dispense chamber until a dispense of fluid is initiated.