Pump Pressure Control for Semiconductor Dispensing
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Solution Overview
Problem
Current multi-stage pumps in semiconductor manufacturing cause pressure spikes and uneven fluid distribution, leading to improper dispensing of expensive photochemicals, resulting in scrap wafers and increased costs due to inefficient monitoring methods.
Innovation Solution
A system and method for controlling pressure across pump stages by adjusting the upstream feed pump's pressure, using real-time feedback from pressure sensors to maintain gentle fluid handling and detect operational anomalies, thereby preventing pressure spikes and ensuring accurate dispensing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If current multi-stage pumps are used to dispense photochemicals, then the pumping function is achieved, but pressure spikes occur that damage the fluid and result in scrap wafers
Solution Approach 1:
The patent implements a feedback control system where pressure sensors monitor the pressure at the dispense pump outlet in real-time, and the controller adjusts the feed pump speed based on this feedback to maintain pressure within acceptable limits, preventing pressure spikes that would damage the fluid
Solution Approach 2:
The system dynamically adjusts the feed pump speed continuously during operation based on real-time pressure conditions, transitioning from static pump operation to dynamic control that adapts to changing pressure conditions to prevent harmful pressure variations
2Reliability
If pressure control mechanisms are added to reduce pressure spikes, then fluid integrity is improved, but device complexity increases
Solution Approach 1:
The controller performs multiple functions including monitoring pressure sensor signals, adjusting feed pump speed, and controlling dispense pump operation, thereby reducing the need for separate dedicated components and minimizing overall system complexity while maintaining fluid integrity
3Measurement precision
If monitoring systems are added to detect improper dispensing, then detection capability is improved, but cost and contamination risk increase
Solution Approach 1:
The pump system monitors its own operation through integrated pressure sensors and controllers that detect improper dispensing conditions and trigger alerts or corrective action, eliminating the need for separate external monitoring systems and reducing both cost and contamination risk
Data Source
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AI summary
Systems and methods for operating a pump are disclosed. Pressure readings in a pump can be compared to a set point or profile to adjust motor speed to control pressure during various stages of operation. According to other embodiments, a baseline profile for one or more parameters of a pump may be established. An operating profile may then be created by recording one or more values for the same set of parameters during subsequent operation of the pump. The values of the baseline profile and the operating profile may then be compared at one or more points or sets of points.