Pump-Probe Scanning Probe Microscopy for Quantum Dynamics Measurement

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Solution Overview

Problem

Existing scanning probe microscopes struggle to precisely evaluate quantum dynamics, including charge transfer and conduction, which hinders advancements in nanoscale science and technology.

Innovation Solution

A scanning probe microscope design that synchronizes pump and probe light emissions with adjustable delay times, using specific phase and intensity settings to control and observe quantum dynamics through precise tunneling current measurements.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a conventional scanning probe microscope is used, then the device structure is relatively simple, but the positioning accuracy and measurement precision are insufficient for advanced semiconductor manufacturing

Engineering Contradiction:
Improvepositioning accuracyVSAvoiddevice structure
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The scanning probe microscope is divided into multiple independent modules including a positioning device with first and second positioning mechanisms, a scanning device with separate scanning probe and stage, and a control device. This segmentation allows each module to be optimized independently for precision while maintaining overall system manageability.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

A positioning device acts as an intermediary between the scanning stage and the scanning probe microscope framework. This positioning device includes multiple positioning mechanisms that sequentially refine the position of the scanning stage, enabling high-precision positioning without requiring the entire microscope structure to be complex.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Measurement precision

If multiple lenses are used in the optical path to improve imaging quality, then the imaging quality increases, but the alignment precision requirements become excessively high and the device complexity increases

Engineering Contradiction:
Improveimaging qualityVSAvoidoptical path alignment
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The illumination source and condenser lens system are extracted and positioned below the substrate stage, separate from the main optical detection path. This allows the imaging optical path to use fewer lenses with relaxed alignment requirements, while the separate illumination system provides the necessary lighting without complicating the detection optics.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The illumination optical path is arranged in a different spatial dimension (below the substrate) compared to the detection optical path (above the substrate). This dimensional separation allows independent optimization of each optical path without the alignment constraints that would arise from stacking multiple lenses in a single linear path.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Adaptability or versatility

If the scanning probe microscope needs to accommodate various sample types and measurement modes, then the adaptability increases, but the device complexity and operation difficulty increase

Engineering Contradiction:
Improvesample compatibilityVSAvoidsystem configuration
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The scanning probe microscope is designed with a universal measurement system that can perform multiple functions including scanning probe microscopy, optical microscopy, and spectroscopy measurements. The positioning device and scanning mechanism serve multiple measurement modes, eliminating the need for separate specialized equipment for different sample types.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The microscope incorporates dynamically adjustable parameters including variable scanning ranges, adjustable positioning precision levels, and flexible measurement modes. The control device allows real-time adjustment of operational parameters to match different sample requirements, making the system adaptable without requiring physical reconfiguration.

Inventive Principle:
Principle #15Dynamics

4Measurement precision

If high positioning accuracy is achieved through multiple positioning mechanisms, then the positioning accuracy improves, but the device complexity and number of components increase

Engineering Contradiction:
Improvepositioning accuracyVSAvoidnumber of components
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The positioning mechanisms are arranged in a nested configuration where the first positioning mechanism provides coarse positioning and the second positioning mechanism provides fine positioning. This nested arrangement allows multiple positioning stages to be integrated in a compact structure, achieving high positioning accuracy without proportionally increasing the number of components or device complexity.

Inventive Principle:
Principle #7Nested doll (Nesting)

Data Source

PatentEP3742151B1Scanning probe microscope
Publication Date: 2026.05.06 GTHERANOSTICS CO LTD
  • EP3742151B1 patent drawingFigure 1
  • EP3742151B1 patent drawingFigure 2
  • EP3742151B1 patent drawingFigure 3(a)~3(b)

AI summary

A scanning probe microscope includes: a pump light output unit that emits pump light having a first specified phase to a specimen and performs emission of the pump light a plurality of number of times to excite the specimen; a probe light output unit that emits probe light having a second specified phase to the specimen once while the specimen is excited by one-time emission of the pump light; and a scanning probe that detects, from the specimen, a probe signal corresponding to each one-time emission of the probe light, wherein the pump light output unit or the probe light output unit includes a delay time adjustment unit that adjusts delay time from a start of the emission of the pump light until a start of the emission of the probe light.