Mode-Localized Inertial Sensing via Pumped Resonator Coupling

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Solution Overview

Problem

Inertial sensors relying on mode localization face limitations in sensitivity and resolution due to challenges in manufacturing weak mechanical couplings, which are also not robust, leading to sensor failures and noise interference, particularly in MEMS devices.

Innovation Solution

The use of a pumping signal to modulate the stiffness of resonators, creating an additional path for energy transfer between vibrational modes, allowing for higher sensitivity and resolution while enabling the use of stronger mechanical couplings that are easier to manufacture and more tolerant to fabrication inaccuracies.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If the coupling strength between resonators is reduced to maximize sensitivity, then the scale factor increases, but the mechanical coupling becomes fragile and prone to fabrication errors

Engineering Contradiction:
ImprovesensitivityVSAvoidrobustness
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The patent changes the operating parameters of the resonators by applying a pumping signal at a frequency equal to the difference between their resonant frequencies. This parametric excitation modifies the effective coupling between resonators, allowing the system to achieve high sensitivity with a scale factor greater than 100 while maintaining robust mechanical couplings that are tolerant to fabrication variations.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent employs periodic pumping signals applied to the resonators to create parametric amplification of the coupling effect. By applying periodic excitation at the difference frequency between resonant modes, the system achieves enhanced energy transfer between resonators without requiring extremely weak mechanical couplings, thus resolving the contradiction between sensitivity and robustness.

Inventive Principle:
Principle #19Periodic action

2Measurement precision

If the coupling strength is reduced to enhance mode localization, then the amplitude ratio changes increase, but the response from smaller amplitude oscillation is lost in noise

Engineering Contradiction:
Improvemode localization detectionVSAvoidnoise interference
Core Design Contradiction:
Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The patent uses periodic pumping signals to modulate the coupling between resonators, creating a time-varying interaction that enhances mode localization effects. This periodic modulation allows the system to achieve large amplitude ratio changes while maintaining signal levels above the noise floor through parametric amplification.

Inventive Principle:
Principle #19Periodic action

Solution Approach 2:

The patent applies preliminary pumping signals to establish optimal operating conditions before measurement. By pre-exciting the resonators with parametric pumping, the system prepares the resonant modes to have optimal amplitude ratios that maximize mode localization detection while minimizing the impact of noise on the smaller amplitude response.

Inventive Principle:
Principle #9Preliminary anti-action

3Measurement precision

If weak mechanical couplings are used to maximize sensitivity, then the scale factor increases, but manufacturing accuracy becomes more difficult to achieve

Engineering Contradiction:
Improvescale factorVSAvoidcoupling strength control
Core Design Contradiction:
Measurement precisionVSManufacturing precision

Solution Approach 1:

The patent changes the effective coupling parameter through parametric excitation rather than relying on fixed mechanical coupling strength. By applying pumping signals at the difference frequency between resonant modes, the system achieves high scale factor (>100) with standard mechanical couplings, eliminating the need for precision control of weak mechanical couplings.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances the scale factor of inertial sensors by more than 100 times, making them more sensitive and resilient to manufacturing defects, while allowing for tuning after fabrication to optimize performance.

Implementation Method 1

The sensor is configured such that changes in an input measurand modulates the stiffness of only one of the resonators

Methodology Applied
Scientific EffectStiffness modulation: Elasticity

Implementation Method 2

two identical (or near identical) resonators, weakly mechanically coupled to one another, and which are driven to vibrate

Methodology Applied
Scientific EffectMechanical coupling: Vibration

Implementation Method 3

changes in the eigenstates of the vibrational modes (which relates to the relative amplitudes of the resonators at the resonant frequencies measured for each of the modes of vibration)

Methodology Applied
Scientific EffectMode localization: Resonance

Data Source

PatentEP3853617B1Inertial sensor and method of inertial sensing with tuneable mode coupling strength
Publication Date: 2023.03.29 SILICON MICROGRAVITY LTD
  • EP3853617B1 patent drawingFigure 1a
  • EP3853617B1 patent drawingFigure 1b~2
  • EP3853617B1 patent drawingFigure 3~4

AI summary

There is provided an inertial sensor comprising a frame, a resonator assembly fixed to the frame comprising a first and second resonator coupled to one another by a mechanical coupling and a drive means coupled to the resonator assembly for driving the first and second resonators to vibrate. The resonator assembly is configured such that energy is transferred between the first and second resonators through the mechanical coupling. An amount of energy transferred through the mechanical coupling is dependent on the value of an input measurand acting on one of the first and second resonators. The inertial sensor also comprises a pumping means coupled to the resonator assembly for applying a pumping signal to the resonator assembly, the pumping means controlled by electrical circuitry, and a sensor assembly configured to detect the amplitude of oscillation of the first resonator at a first resonant frequency and the amplitude of oscillation of the second resonator at a second resonant frequency. The electrical circuitry is configured to control the pumping means to apply a pumping signal that has a frequency substantially equal to a difference between the first resonant frequency and the second resonant frequency. When the input measurand has the first value, the signal from the pumping means adjusts an amplitude ratio of the amplitudes of oscillation of the first and second resonator detected by the sensor assembly so that the amplitude ratio is within a predetermined amplitude ratio range over an expected range of input measurand values. An output of the inertial sensor is based on the amplitude ratio.