Integrated Purge Gas Distribution for Clean Substrate Containers
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Solution Overview
Problem
Existing substrate container purge gas distribution systems face challenges in efficiently delivering purge gas to prevent contamination and improve yield, as they often require complex installation within the container, leading to potential errors and particle generation.
Innovation Solution
A purge flow distribution system that includes a purge module configured to filter and direct purge gas into a substrate container through a combination of a gas distributor and check valve, allowing for external assembly and installation without opening the container, thereby reducing contamination risks and improving gas distribution efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If purge gas is distributed using discrete components (grommet, check valve, sealing members) installed inside the substrate container, then the purge gas can be delivered to protect substrates, but the installation becomes complex and prone to errors and particle generation
Solution Approach 1:
The patent combines multiple discrete components (grommet, check valve, sealing members, and gas distribution structure) into a single integrated purge gas distribution assembly. This assembly can be installed as one unit into the substrate container, eliminating the need for separate installation of each component and reducing installation complexity while maintaining reliable purge gas delivery.
Solution Approach 2:
The purge gas distribution assembly is pre-assembled with all necessary components (grommet, check valve, sealing members) attached to the gas distribution structure before installation into the substrate container. This preliminary assembly ensures proper configuration and reduces the risk of installation errors and particle generation during the installation process.
2Ease of manufacture
If the substrate container is opened for installation of purge assemblies, then the components can be installed, but contamination risks and particle generation increase
Solution Approach 1:
The purge gas distribution assembly is completely pre-assembled outside the substrate container, with all components (grommet, check valve, sealing members, gas distribution structure) configured and tested before installation. This allows the entire assembly to be installed as a single unit without opening the substrate container, thereby eliminating contamination risks and particle generation associated with internal installation operations.
Solution Approach 2:
The patent extracts the entire purge gas distribution assembly from the substrate container installation process, performing all assembly operations externally. The completed assembly is then installed as a single unit into the container, separating the complex assembly operations from the clean environment inside the substrate container and eliminating contamination risks.
3Productivity
If standard diffusers are used with fixed flow rates, then the purge gas supply is simple, but the distribution efficiency and optimization for different ports are limited
Solution Approach 1:
The gas distribution structure includes multiple ports with individually adjustable flow rates, allowing each port to be optimized for its specific requirements. The system enables local adjustment of purge gas flow characteristics at different locations within the substrate container, improving overall distribution efficiency while maintaining a relatively simple overall structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system enhances purge gas distribution by allowing external assembly and installation, reducing errors and contamination, and improving the yield of substrate processing by ensuring optimal purge gas flow and reduced particle generation.
Implementation Method 1
dividing, in the chamber, the purge gas into at least a first flow path to supply the purge gas to the at least one outlet of the gas distributor
Data Source
AI summary
A method and purge flow distribution module for controlling flow of purge gas into a substrate container is provided. The purge flow distribution module includes a purge module comprising an inlet for receiving a flow of purge gas, a check valve for regulating a flow direction of the purge gas, and an outlet for supplying the purge gas, and a chamber surrounding at least an outlet of the purge module. The chamber includes a first opening for directing a first flow path to at least one rear gas distributing device for distributing a first portion of the purge gas in a rear portion of the substrate container and a second opening for a second flow path to at least one front gas distributing device for distributing a second portion of the purge gas to a front portion of the substrate container.