Purge Nozzle Guide Surface Alignment Mechanism

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Solution Overview

Problem

The complexity of existing purge apparatus structures and the need for electrical control and maintenance arise due to the use of actuators to elevate and lower nozzles, which can obstruct container alignment.

Innovation Solution

A purge apparatus configuration where the nozzle contacts the container before alignment, using a guide surface and elastic members to lower the nozzle and align the container without an actuator, ensuring proper alignment and preventing gas leakage by inclining the nozzle's flat surface to fit the gas introduction hole.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If an actuator is used to elevate and lower the nozzle, then the nozzle can be positioned to avoid obstructing container alignment, but the structure becomes complicated and requires electrical control and maintenance

Engineering Contradiction:
Improvealignment operationVSAvoidapparatus structure
Core Design Contradiction:
Ease of operationVSDevice complexity

Solution Approach 1:

The invention removes the actuator component from the system entirely. Instead of using an actuator to elevate and lower the nozzle, the design allows the nozzle to remain in a fixed elevated position that does not obstruct alignment operations, thereby eliminating the complexity associated with actuators while preserving the alignment function.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

Rather than lowering the nozzle to avoid obstruction (conventional approach), the invention inverts the approach by elevating the nozzle above the alignment member's upper end. This inversion allows the alignment member to operate freely below the nozzle without requiring any moving mechanism for the nozzle itself.

Inventive Principle:
Principle #13The other way round (Inversion)

2Ease of operation

If the nozzle is elevated above the alignment member, then alignment is not obstructed, but the nozzle may not properly contact the gas introduction hole of the container

Engineering Contradiction:
Improvealignment operationVSAvoidgas introduction reliability
Core Design Contradiction:
Ease of operationVSReliability

Solution Approach 1:

The invention employs a flexible seal member (such as an O-ring or gasket) between the nozzle and the gas introduction hole. This flexible element allows the nozzle to maintain an elevated position for unobstructed alignment while still achieving reliable sealing and gas introduction through the flexibility of the seal member that accommodates positional variations.

Inventive Principle:
Principle #30Flexible shells and thin films

Solution Approach 2:

The invention changes the positional parameter of the nozzle from a low position (that would obstruct alignment) to an elevated position (above the alignment member). This parameter change is compensated by using a flexible seal mechanism that ensures reliable gas introduction despite the altered position, thus resolving the contradiction between alignment ease and gas introduction reliability.

Inventive Principle:
Principle #35Parameter changes

3Reliability

If the nozzle is lowered to contact the container first, then gas introduction is enabled, but the nozzle obstructs the alignment member from aligning the container

Engineering Contradiction:
Improvegas introduction reliabilityVSAvoidalignment operation
Core Design Contradiction:
ReliabilityVSEase of operation

Solution Approach 1:

The invention inverts the conventional sequence and positioning by elevating the nozzle above the alignment member instead of lowering it. This inversion ensures that the alignment member can freely align the container without obstruction from the nozzle, while the elevated nozzle remains positioned to contact the gas introduction hole when the container is properly aligned.

Inventive Principle:
Principle #13The other way round (Inversion)

Solution Approach 2:

The invention segments the functional zones vertically: the alignment member operates in the lower zone to align the container, while the nozzle operates in the upper zone above the alignment member to introduce gas. This spatial segmentation eliminates interference between the two functions while maintaining both alignment ease and gas introduction reliability.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration simplifies the apparatus, eliminates the need for electrical control and maintenance, and ensures accurate alignment and gas-tight sealing without actuator assistance.

Implementation Method 1

the upper surface of the nozzle is lowered by a load applied from the container

Methodology Applied
Scientific EffectElastic deformation: Elasticity

Implementation Method 2

the guide surface of the nozzle guides the container

Methodology Applied
Scientific EffectFriction contact: Friction

Implementation Method 3

purge gas such as nitrogen gas or clean dry air is injected into containers such as FOUPs that house wafers for purging the containers

Methodology Applied
Scientific EffectGas flow displacement: Pressure Gradient

Data Source

PatentEP3121845B1Purge apparatus and purge method
Publication Date: 2021.07.28 MURATA MASCH LTD
  • EP3121845B1 patent drawingFigure 1
  • EP3121845B1 patent drawingFigure 2
  • EP3121845B1 patent drawingFigure 3~4

AI summary

A nozzle is made not to obstruct the alignment of a container without an actuator. When the nozzle contacts the container before the alignment member does, the container is guided by means of a guide surface of the nozzle, the nozzle is lowered by a load applied from the container so that the alignment member contacts the container to align the container, and purge gas is injected from the nozzle into the container.