Purging Apparatus for Semiconductor Wafer Containers
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing semiconductor wafer container transfer systems lack an efficient method for purging containers with inert gases like N2 near processing equipment, leading to oxidation and contamination issues during transfer, and require significant remodeling to integrate purging apparatuses within processing equipment.
Innovation Solution
A purging apparatus comprising a local vehicle with a hoist, travelling rail, purging table, and gas feeding device, positioned between overhead transfer vehicles and container transfer points, allowing for efficient gas purging without obstructing transfer paths, utilizing a slide shelf and fixed shelves to support and move containers for effective gas supply.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a purging apparatus is integrated within processing equipment, then purging effectiveness is improved, but device complexity and remodeling requirements increase significantly
Solution Approach 1:
The purging apparatus is extracted from the processing equipment and placed as a separate standalone unit in the vicinity of the load port. This allows the purging function to be maintained while avoiding the need for complex remodeling of the processing equipment itself. The separate placement enables independent operation and simplifies installation.
Solution Approach 2:
The purging apparatus acts as an intermediary device between the overhead transfer vehicle and the load port. It provides the purging function in the transfer path without being part of either the transfer system or the processing equipment, thus resolving the contradiction between effectiveness and complexity.
2Productivity
If a purging apparatus is placed in the vicinity of processing equipment, then purging speed is improved, but obstruction of transfer paths may occur
Solution Approach 1:
The purging apparatus is positioned in the vertical dimension below the overhead transfer rail, while the transfer path operates in the horizontal dimension. This spatial separation in different dimensions allows the purging apparatus to be close to the load port for fast purging without obstructing the horizontal transfer path of the overhead vehicle.
Solution Approach 2:
The purging table is designed with a slide shelf that can move locally to accommodate transfer operations. When a container needs purging, the shelf positions itself; when transfer is needed, the shelf retracts. This local adaptability maintains transfer path accessibility while enabling fast purging when required.
3Object-affected harmful factors
If containers are purged during transfer, then oxidation prevention is improved, but transfer time allowance increases
Solution Approach 1:
The purging apparatus performs purging as a preliminary action before containers are transferred to the load port or during brief waiting periods. By purging in advance rather than during active transfer, oxidation prevention is achieved without extending the actual transfer time, as the purging occurs in parallel or beforehand.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables prompt and effective purging of containers near transfer points, reducing oxidation and contamination risks, and enhancing transfer efficiency by maintaining cleanliness and reducing production delays in semiconductor processing.
Implementation Method 1
a purging gas feeding device configured to feed a purging gas into the containers supported on the purging table
Data Source
Figure 1
Figure 2
Figure 3
AI summary
Containers are purged between overhead transfer vehicles and a container transfer place to or from which the containers are transferred. A travelling rail for a local vehicle is provided below a travelling rail for the overhead transfer vehicles and above the container transfer place, and a local vehicle provided with a hoist for raising and lowering the containers travels. A purging table for placing the containers is provided below the travelling rail for the local vehicle so as not to block a portion over the container transfer place and a purging gas feeding device feeds a purging gas into the containers supported on the purging table.