Compact Purification Assembly for Semiconductor Gas Systems
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Solution Overview
Problem
Existing purification systems for industrial gases, such as those used in semiconductor manufacturing, face challenges in effectively removing particulate matter and chemical contaminants due to their size, complexity, and reliability issues, which can introduce flaws into manufactured semiconductors.
Innovation Solution
The development of compact purification assemblies comprising a purification unit with a fluid flow path and a permeable purification element, integrated within a block member with a socket configuration, allowing for easy assembly and ensuring mechanical integrity, effectiveness, and versatility.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If existing purification systems are used to remove particulate matter and chemical contaminants, then purification effectiveness is improved, but system size and complexity increase
Solution Approach 1:
The patent combines multiple purification functions (particulate removal and chemical contaminant removal) into a single integrated purification assembly. The assembly merges the purification element, seal, and engagement features into one unified component that can be inserted into a socket, eliminating the need for separate purification devices and reducing overall system complexity while maintaining purification effectiveness.
Solution Approach 2:
The purification element is nested within a containment structure that includes integrated sealing features. The seal is positioned within the purification element assembly, and the entire purification unit is nested within the socket of the block member. This nested configuration allows multiple functional elements to occupy compact space while maintaining their individual functions.
2Adaptability or versatility
If compact purification assemblies are used to reduce size, then versatility is improved, but mechanical integrity may be compromised
Solution Approach 1:
The purification system is segmented into modular components: a purification unit with integrated seal and engagement surfaces, and a block member with a socket. This segmentation allows the compact purification assembly to be easily installed and removed while maintaining mechanical integrity through the engagement surfaces that provide secure mechanical connection between components.
Solution Approach 2:
The engagement surfaces feature curved or rounded geometries that distribute mechanical stresses more evenly across the connection interface. The socket and purification unit engagement surfaces are designed with curved profiles that enhance mechanical interlocking while accommodating thermal expansion and contraction, thereby maintaining mechanical integrity in a compact design.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution provides highly effective and reliable purification of gases by maintaining mechanical integrity and compactness, enabling versatile use while ensuring effective removal of particulate and chemical contaminants, thus preventing flaws in semiconductor manufacturing.
Implementation Method 1
a purification element positioned in the cavity across the fluid flow path
Implementation Method 2
purification of gases by maintaining mechanical integrity and compactness, enabling versatile use while ensuring effective removal of particulate and chemical contaminants
Data Source
AI summary
A purification assembly (10) may comprise a block member (12) and a purification unit (11) attached to the block member. A method of assembling a purification assembly may comprise attaching a purification unit to a block member. A purification unit may include fitting a fluid flow path (14) extending through the fitting, and a purification element (15) in the fluid flow path.