Onsite Purification Feedback Control for Wide Turndown Purity

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

Existing onsite purification systems for chemicals and specialty gases in semiconductor manufacturing struggle to maintain consistent purity levels while accommodating variable product flow rates, often resulting in significant production downtime and revenue losses due to inadequate turn down ratios and inefficient product handling.

Innovation Solution

An onsite purification system comprising multiple purification units and an automatic stream control system that allows for the division of purified streams into output and feedback streams, enabling consistent purity maintenance across a wide range of production capacities from 0% to 100% through the use of distillation columns and an automated control system.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If existing onsite purification systems are used, then purification function is provided, but turndown ratio is limited and productivity cannot be adjusted to meet varying demand

Engineering Contradiction:

Improveturndown ratioVSAvoidproduction capacity adjustment

Core Design Contradiction:

Adaptability or versatilityVSProductivity

Solution Approach 1:

The purification system is divided into multiple independent purification units (first purification unit, second purification unit, etc.) that can operate independently or in parallel. This segmentation allows the system to adjust its effective capacity by activating or deactivating specific units, thereby achieving a wide turndown ratio while maintaining consistent purity levels across varying production demands.

Inventive Principle:

Principle #1Segmentation

2Reliability

If purification system operates at constant flow, then purity is maintained, but inability to adjust flow rate causes production downtime when demand changes

Engineering Contradiction:

Improvepurity consistencyVSAvoidproduction downtime

Core Design Contradiction:

ReliabilityVSLoss of time

Solution Approach 1:

The system dynamically adjusts the operation of multiple purification units based on real-time product demand. When demand increases, additional units are activated; when demand decreases, units are deactivated. This dynamic configuration allows the system to maintain optimal flow rates and purity consistency for each active unit while adapting overall capacity to match varying production requirements, eliminating production downtime.

Inventive Principle:

Principle #15Dynamics

3Device complexity

If single purification unit is used, then system is simple, but cannot maintain purity across wide range of flow rates

Engineering Contradiction:

Improvenumber of purification unitsVSAvoidpurity maintenance

Core Design Contradiction:

Device complexityVSReliability

Solution Approach 1:

Multiple purification units are designed with identical or similar purification mechanisms, allowing them to perform the same purification function. This multi-functionality enables the system to maintain consistent purity levels across a wide range of total flow rates by activating the appropriate number of units, while each individual unit operates within its optimal performance range.

Inventive Principle:

Principle #6Universality (Multi-functionality)

4Object-affected harmful factors

If chemical stream is stopped during wafer change, then contamination risk is reduced, but production efficiency decreases

Engineering Contradiction:

Improvecontamination riskVSAvoidproduction efficiency

Core Design Contradiction:

Object-affected harmful factorsVSProductivity

Solution Approach 1:

The system maintains continuous operation of multiple purification units during wafer changes and other transient events. By having redundant purification capacity through multiple units, the system can continue purifying chemical streams without interruption, thereby maintaining production efficiency while still preventing contamination through consistent purification performance.

Inventive Principle:

Principle #20Continuity of useful action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system ensures continuous, high-purity product delivery with a wide turndown ratio, minimizing production downtime and product losses by maintaining predetermined purity levels and allowing instantaneous adjustments to meet varying demand without venting excess product, thus optimizing production efficiency and reducing waste treatment needs.

Implementation Method 1

at least one of the purification units can be a distillation column

Methodology Applied

Scientific EffectDistillation: Distillation

Implementation Method 2

The condenser can be a common condenser for both distillation columns

Methodology Applied

Scientific EffectCondensation: Condensation

Data Source

PatentUS9216364B2Onsite ultra high purity chemicals or gas purification

Publication Date: 2015.12.22 VERSUM MATERIALS US LLC

AI summary

An onsite purification plant/system to delivery high and ultra high purity product, such as, process chemicals, industrial and specialty gases to manufacturing processes within the onsite plant turndown ratio from 0% to 100% while preserving the predetermined purity of the supplied substances within a predefined specification range is provided. Preserving liquid/vapor ratio in at least one of the purification means/units ensuring that product purity range stays unchanged is achieved by redirecting the product back into the onsite purification plant/system.