Multi-Block Pushup Sequence Control for Semiconductor Die Peeling
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The creation of a time chart recipe for a semiconductor manufacturing process is complicated and time-consuming, making it difficult to manage the operations of a pushup unit with multiple blocks.
Innovation Solution
A semiconductor manufacturing apparatus is equipped with a display device and control unit that allows for easy configuration of a pushup sequence with inputable parameters, enabling independent control of multiple blocks for precise operations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If a time chart recipe is created using conventional methods with multiple blocks and steps, then the pushup sequence can be controlled, but the creation process becomes complicated and time-consuming
Solution Approach 1:
The pushup sequence is divided into multiple independent blocks, where each block can be configured and controlled separately. This segmentation allows operators to manage complex pushup operations through modular units rather than handling the entire sequence as one complex entity, thereby simplifying the configuration process while maintaining operational capability.
Solution Approach 2:
The system automatically generates the time chart recipe based on predetermined parameters and block configurations. By performing the recipe generation as a preliminary automated action rather than manual configuration, the system eliminates the time-consuming and complicated manual creation process while ensuring consistent and accurate pushup sequences.
2Manufacturing precision
If multiple blocks are used for independent operation, then the pushup sequence precision is improved, but the difficulty of creating and managing the time chart recipe increases
Solution Approach 1:
The control unit automatically generates the time chart recipe by processing the configured block parameters and sequence settings. This self-service capability eliminates the need for manual recipe creation, allowing the system to maintain high precision multi-block control while automatically handling the complex task of time chart generation, thus saving operator time and effort.
Data Source
AI summary
The present disclosure aims to provide a technology that makes it easy to create a time chart recipe. Disclosed is a semiconductor manufacturing apparatus including a pushup unit, a display device, and a control unit. The pushup unit has a plurality of blocks that are each able to independently move up and down. The display device displays a setting screen that configures a pushup sequence for the plurality of blocks with a plurality of steps and allows the height of the plurality of blocks to be inputted for each step. The control unit is configured to be able to set a plurality of pushup parameters by inputting one of setting items displayed on the setting screen and control the operations of the plurality of blocks in accordance with the setting plurality of pushup parameters.