Pushup Unit Mechanism for Low-Stress Die Peeling
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing semiconductor manufacturing processes face challenges in efficiently peeling and picking up individual dies from a dicing tape using a pushup unit, particularly due to limitations in the number and configuration of pushup blocks, which can lead to increased stress on dies and reduced compatibility with larger dies.
Innovation Solution
A mechanism is introduced for the pushup unit that allows independent vertical movement of multiple blocks, utilizing a first member with a through-hole and connected rods to convey vertical motion, enhancing the number of pushup blocks and reducing stress on dies.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the number of pushup blocks is increased, then the peel area per block is reduced and die deformation is minimized, but the device complexity and drive mechanism complexity increase
Solution Approach 1:
The patent combines multiple drive mechanisms into a single integrated drive section that controls all pushup blocks through one motor and one plunger mechanism. The single plunger mechanism drives multiple rods that are connected to different pushup blocks, allowing simultaneous control of multiple blocks without requiring separate drive mechanisms for each block. This merging approach reduces overall system complexity while maintaining the ability to independently control each block's vertical position.
Solution Approach 2:
The drive section is designed as a universal mechanism that can control multiple pushup blocks through a single motor and plunger mechanism. The plunger mechanism serves multiple functions by driving multiple rods that connect to different blocks, making the drive system multi-functional rather than requiring dedicated mechanisms for each block. This universal approach reduces complexity while maintaining independent control capability.
2Ease of operation
If a separate drive mechanism is provided for each block, then independent control of each block is achieved, but the device complexity and number of components increase
Solution Approach 1:
The patent segments the drive function by providing individual rods for each pushup block that can be independently controlled through the shared plunger mechanism. Each rod is connected to a specific block and can convey vertical motion independently, allowing each block to be controlled separately despite sharing a common drive mechanism. This segmentation of the transmission path enables independent block control without requiring separate motors or plunger mechanisms for each block.
Solution Approach 2:
The rods act as intermediary elements between the single plunger mechanism and the multiple pushup blocks. Each rod serves as a mediator that transmits motion from the shared plunger mechanism to its corresponding block, enabling independent control of each block through a unified drive system. This intermediary approach reduces the number of drive mechanisms while maintaining independent control capability.
3Adaptability or versatility
If the number of pushup blocks is increased to handle larger dies, then compatibility with larger dies is improved, but the area occupied by the pushup unit increases
Solution Approach 1:
The patent arranges the pushup blocks and their supporting plates in a nested or space-efficient configuration where multiple blocks can be positioned within a compact area. The plates that support the rods are arranged to minimize the overall footprint of the pushup unit while still accommodating multiple blocks. This nesting approach allows the system to handle larger dies by providing multiple pushup blocks without proportionally increasing the area occupied by the pushup unit.
Solution Approach 2:
The patent utilizes vertical arrangement and three-dimensional space optimization to accommodate multiple pushup blocks within a compact footprint. By arranging blocks and support structures in multiple dimensions rather than simply expanding in one plane, the system can provide increased block count for larger die compatibility while minimizing the horizontal area occupied by the pushup unit.
Data Source
AI summary
To provide a new mechanism for driving a plurality of blocks of a pushup unit. A pushup unit includes a mechanism section for independently moving each of a plurality of blocks up and down. The mechanism section includes a first mechanism section having: (a) a first member having an upper surface, a lower surface opposite the upper surface, and a through-hole penetrating between the upper surface and the lower surface; (b) a first rod connected to the upper surface of the first member to convey the vertical motion of the first member to the blocks; and (c) a second rod extended from below through the through-hole to convey the vertical motion to the blocks.