PVA Brush Cleaning via Vibration and Organic Solvent
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Solution Overview
Problem
Conventional PVA brush pre-processing methods are inefficient in removing internal impurities, leading to poor yield and productivity in CMP processes, as they fail to effectively remove particles and organic matter, and struggle with analyzing residues due to low concentration.
Innovation Solution
A PVA brush cleaning method involving a cleaning solution with organic matter at 10 wt% to 50 wt% concentration, combined with vibration to remove siloxane compounds and impurities, and subsequent measurement of frictional and elastic properties to ensure thorough cleaning.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If DIW flow-through method or scrubbing method is used for PVA brush pre-processing, then the brush can be prepared for use, but the internal impurity removal efficiency is poor and productivity is deteriorated
Solution Approach 1:
The patent applies ultrasonic vibration to the PVA brush during the pre-processing stage to enhance the removal of internal impurities. The vibration creates cavitation effects and mechanical forces that dislodge particles and organic matter from within the brush structure, significantly improving impurity removal efficiency without requiring extended processing times, thus maintaining high productivity.
2Device complexity
If only DIW is used for cleaning, then the process is simple, but impurities that are insoluble in DIW cannot be removed
Solution Approach 1:
The patent modifies the chemical parameters of the cleaning solution by adding organic solvents (such as alcohol or acetone) to the deionized water. This parameter change enables the solution to dissolve both water-soluble and organic impurities that are insoluble in pure DIW, thereby improving impurity removal capability while maintaining a relatively simple one-step cleaning process.
3Productivity
If conventional pre-processing methods are used, then the brush can be used, but residues cannot be analyzed due to low concentration
Solution Approach 1:
The patent performs a concentrated pre-cleaning action using ultrasonic vibration and organic solvent-containing solution before the brush is put into service. This preliminary action removes and concentrates impurities into the cleaning solution, which can then be collected and analyzed. The concentrated residues in the cleaning solution enable precise analysis while the brush remains available for use after cleaning.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method significantly improves the removal efficiency of impurities and organic matter from PVA brushes, enhancing the yield of CMP and semiconductor processes by effectively removing impurities and allowing for easier residue analysis at higher concentrations.
Implementation Method 1
removing a siloxane compound in the PVA brush using a cleaning solution containing organic matter
Implementation Method 2
removing impurities in the PVA brush by applying vibration to the PVA brush
Data Source
AI summary
A PVA brush cleaning method includes immersing a PVA brush in a cleaning solution containing an organic matter, thereby removing a siloxane compound in the PVA brush; and applying vibration to the PVA brush, thereby removing impurities in the PVA brush.