PVD Ceramic Coating Rotation Speed Control

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Solution Overview

Problem

Existing physical vapor deposition (PVD) processes for ceramic coatings on substrates, such as gas turbine engine components, face challenges in controlling the durability of the coatings, particularly in thermal cycling conditions, due to variations in the coefficient of thermal expansion between the substrate and the ceramic coating, and the impact of deposition rate and pressure on microstructural integrity.

Innovation Solution

The method involves controlling the rotational speed of the substrate during PVD to achieve specific segment thicknesses of the ceramic coating, typically between 0.3-0.5 micrometers, in conjunction with low vacuum internal chamber pressures, to enhance the durability of the coating by optimizing the microstructural adherence and strain tolerance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If the substrate rotation speed is increased during PVD, then the deposition rate increases and productivity improves, but the microstructural integrity and durability of the ceramic coating deteriorate due to reduced segment thickness control

Engineering Contradiction:
Improvedeposition rateVSAvoidcoating durability
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The patent applies parameter changes by optimizing the substrate rotation speed to a specific range (1-10 revolutions per minute) that balances deposition rate with microstructural integrity. This parameter optimization allows the coating process to achieve both acceptable productivity and improved coating durability through controlled segment thickness (0.3-0.5 micrometers), resolving the contradiction between fast deposition and microstructural quality.

Inventive Principle:
Principle #35Parameter changes

2Manufacturing precision

If the substrate rotation speed is decreased to improve microstructural adherence, then segment thickness control improves, but productivity and deposition rate decrease

Engineering Contradiction:
Improvesegment thickness controlVSAvoiddeposition rate
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The patent resolves this contradiction by establishing an optimal rotation speed range (1-10 rpm) that achieves precise segment thickness control (0.3-0.5 micrometers) while maintaining acceptable deposition rates. This optimized parameter range prevents both excessive thickness variation and unacceptable productivity loss, achieving manufacturing precision without sacrificing excessive productivity.

Inventive Principle:
Principle #35Parameter changes

3Reliability

If low vacuum chamber pressure is used to improve coating microstructure, then segment adherence and strain tolerance improve, but process complexity and control difficulty increase

Engineering Contradiction:
Improvestrain toleranceVSAvoidprocess control
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent applies parameter changes by optimizing the chamber pressure to a specific range (10-100 milliTorr) that achieves improved strain tolerance and segment adherence while maintaining manageable process complexity. This optimized pressure range creates favorable conditions for microstructural development without requiring excessively complex vacuum systems or control mechanisms, balancing reliability improvement with practical process control.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach results in improved spallation resistance and strain tolerance of the ceramic coatings, as demonstrated by the comparison of coatings deposited at different rotational speeds and pressures, leading to enhanced durability and performance in thermal cycling conditions.

Implementation Method 1

One type of PVD process utilizes an electron beam gun to melt and evaporate a source coating material contained within a crucible. The evaporated source material condenses and deposits onto the substrate.

Methodology Applied
Scientific EffectEvaporation: Evaporation

Implementation Method 2

Physical vapor deposition using rotational speed selected with respect to deposition rate

Methodology Applied
Scientific EffectPhysical Vapour Deposition: Physical Vapour Deposition

Data Source

PatentEP3097219B2Physical vapor deposition using rotational speed selected with respect to deposition rate
Publication Date: 2023.10.11 RTX CORP
  • EP3097219B2 patent drawingFigure 1~3
  • EP3097219B2 patent drawingFigure 4~5
  • EP3097219B2 patent drawingFigure 6

AI summary

A method for use in a physical vapor deposition coating process includes depositing a ceramic coating material from a plume onto at least one substrate to form a ceramic coating thereon, and during the deposition, rotating the at least one substrate at a rotational speed selected with respect to deposition rate of the ceramic coating material onto the at least one substrate.