PVD Substrate Fixing Tool With Non-Coaxial Clamping
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Solution Overview
Problem
Existing PVD systems face challenges in efficiently fixing substrates during magnetron sputtering, particularly in performing two circular axial turning motions and accommodating different strength grades, leading to inefficiencies and increased labor costs due to complex fixing methods and potential coating of unwanted parts.
Innovation Solution
A tool with a clamp and forcing structure featuring non-coaxial axis holes allows for adjustable squeeze force and rotation, enabling substrates of various shapes and hardness levels to be securely fixed and coated efficiently, reducing the need for multiple satellites and minimizing process time.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If spring supported jaw or screw fixing methods are used, then substrate can be fixed to satellite, but fixtures may stay in effective magnetic area and get coated, requiring cleaning or replacement
Solution Approach 1:
The patent extracts the fixtures from the effective magnetic coating area by designing the tool holder with a specific geometric configuration where the clamping jaws are positioned outside the magnetron sputtering plasma zone. This spatial separation prevents the fixtures from being coated during the PVD process, eliminating the need for cleaning or replacement and reducing maintenance complexity while maintaining reliable substrate fixation.
2Reliability
If fixing screw and nut connector are used, then substrate can be fixed securely, but fixing process consumes more time and requires skilled labor
Solution Approach 1:
The patent segments the fixing mechanism into modular components: a tool holder with integrated clamping jaws, connection pins, and quick-release features. This segmentation allows for rapid assembly and disassembly of substrates without requiring complex screw-and-nut operations, thereby reducing fixing time and eliminating the need for skilled labor while maintaining secure fixation through the distributed clamping force of multiple jaws.
3Ease of operation
If runner of plastic mould is projected out for fixing, then substrate can be held, but unwanted parts get coated due to projection
Solution Approach 1:
The patent introduces an intermediary structure - the tool holder with specifically positioned clamping jaws - that mediates between the substrate and the satellite. The jaws clamp the substrate directly without requiring projected runners, and their positioning outside the effective magnetic area prevents unwanted coating while maintaining ease of operation through simple clamp engagement.
4Ease of operation
If jaw gets stuck due to blocked spring, then fixing mechanism fails, requiring jaw and spring replacement
Solution Approach 1:
The patent removes the problematic spring component entirely from the fixing mechanism by using a spring-less clamping design where the clamping force is provided by the rigid tool holder structure and cam mechanisms. This extraction of the spring element eliminates the possibility of spring blocking and jaw sticking, thereby maintaining automatic fixing operation while ensuring continuous reliability without requiring replacement of stuck components.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The tool enables better coating efficiency by allowing substrates to rotate in two circular axial motions and accommodating different strength grades, reducing coating time and labor costs while preventing unwanted coating, thus enhancing the flexibility and performance of PVD systems.
Implementation Method 1
the magnetron provides a magnetic field that concentrates the ions onto the target (cathode)
Implementation Method 2
As the ions strike the target, neutral atoms, molecules and secondary electrons are emitted (sputtering)
Implementation Method 3
the plasma, in the conventional magnetron sputtering method, is concentrated above the target and might cause ions to bombard and affect the corresponding film on the substrate
Data Source
Figure 1.1~1.2
Figure 2.1~2.2
Figure 3
AI summary
The present invention refers to a tool for fixing a substrate with a satellite in a PVD process. The tool for fixing the substrate (7) with the satellite (6) in a PVD process to perform at least two circular axial turning motions and to work with different strength/ squeeze grades for getting better coating efficiency. The tool preferably comprises of a clamp (16), at least two connecting means and a forcing structure (17). The clamp (16) may include at least two connection pins and a head. The forcing structure (17) can be provided to control a squeeze force on the substrate (7). The connection pins of the clamp (16) can be fixed in non-coaxial axis holes (12, 13) that may be provided in the connecting means thereby making squeeze force on the substrate (7) for coating. One end of the forcing structure (17) can be connected to the connecting means and another end may be connected to the satellite (6).