Plasma Torch Insulation for Ultra-High Vacuum PVD
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Solution Overview
Problem
Conventional physical vapor deposition systems using BAKELITE phenol resin plasma torches generate outgas in ultra-high vacuum environments, and existing fluid mixing methods require external energy or mechanical moving parts, making them inefficient for forming high-density films.
Innovation Solution
A physical vapor deposition system employing a plasma torch with a polymer-based or non-polymer-based insulation pipe and a rod-shaped cathode, generating less outgas, combined with a fluid mixing mechanism utilizing coaxially facing colliding jet flows for uniform mixing without external energy or mechanical parts.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-generated harmful factors
If BAKELITE phenol resin plasma torch is used, then plasma generation is achieved, but outgas is generated in ultra-high vacuum environment
Solution Approach 1:
The patent extracts and removes the problematic BAKELITE phenol resin insulation pipe from the plasma torch system, replacing it with alternative insulation materials that do not generate outgas in ultra-high vacuum environments, thereby eliminating the harmful outgas contamination while maintaining plasma generation capability
Solution Approach 2:
The patent changes the material parameter of the insulation pipe from BAKELITE phenol resin to materials with different outgas characteristics, selecting materials that are compatible with ultra-high vacuum environments and do not contaminate the vacuum space with outgas
2Device complexity
If conventional fluid mixing methods are used, then mixing is achieved, but external energy or mechanical moving parts are required
Solution Approach 1:
The patent implements a self-service mixing mechanism where the fluid streams mix themselves through their own kinetic energy and mutual interaction, eliminating the need for external energy input or mechanical moving parts while achieving effective mixing of the deposited materials
Solution Approach 2:
The patent uses pneumatic principles by allowing fluid streams to mix through their own flow dynamics and pressure differences, utilizing the inherent pneumatic properties of the gases to achieve mixing without mechanical intervention
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system achieves reduced outgas contamination and uniform film deposition, enabling the formation of dense films with improved quality and efficiency in ultra-high vacuum environments.
Implementation Method 1
a plasma torch having a substantially cylindrical conductive anode, a polymer-based or non-polymer-based insulation pipe inserted inside the anode and generating less outgas than that by BAKELITE phenol resin, and a rod shaped cathode inserted inside the insulation pipe so as not to contact the anode, a negative voltage being applied to the cathode and a positive voltage being applied to the anode and/or the evaporation source to thereby to form plasma
Implementation Method 2
a negative voltage and a positive voltage are applied to them to induce an arc discharge between the two poles
Implementation Method 3
The flow of gas due to the pressure difference is accelerated to the supersonic speed of about Mach 3.6 by a specially designed supersonic nozzle (Laval nozzle)
Implementation Method 4
making the microparticles transferred from the evaporation chamber ride on a supersonic gas flow created by the supersonic nozzle, and making the microparticles deposit on the substrate for film formation by physical vapor deposition
Data Source
AI summary
A physical vapor deposition system for making microparticles generated by using a non-transfer type plasma torch not generating an outgas even in an ultra-high vacuum environment accelerate by a supersonic gas flow and depositing microparticles on a substrate to form a coating film is provided. Provision is made of an evaporation chamber (10, 20) having a plasma torch (16, 26) and an evaporation source (15, 25) inside it and a film formation chamber 30 having a supersonic nozzle 35 and a substrate for film formation 33. Each plasma torch has a substantially cylindrical electrically conductive anode 40, a polymer-based or non-polymer-based insulation pipe 50 inserted to the inner side of that and generating less outgas than a phenol resin, and a rod shaped cathode 60 inserted to the inner side of an insulation pipe 50. Microparticles are generated from an evaporation source (15, 25) by a plasma obtained by applying voltages to the anode 40 and the cathode 60, ejected from a supersonic nozzle 35, made to ride on a supersonic gas flow, and deposited by physical vapor deposition onto a substrate for film formation 33.