PVD Target Additive Manufacturing for Thermal Management
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Solution Overview
Problem
Existing methods for producing PVD targets face challenges such as complex and costly manufacturing processes, reduced production yield due to brittle materials, and inefficient use of target material, particularly in magnetron sputtering where material is wasted along the race track, leading to premature target degradation.
Innovation Solution
The method involves using additive techniques like thermal spray, conventional laser cladding, extreme high-speed laser cladding, and 3D printing to build or repair PVD targets, allowing for improved mechanical, thermal, and electrical contact, as well as the ability to create predefined micro-gaps and integrate cooling channels, enabling efficient reuse and material combination.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional sputtering power is used, then the coating process is simple and target durability is maintained, but the vaporized particles are mostly not ionized reducing coating density
Solution Approach 1:
The patent implements pulsed direct current (DC) sputtering where the sputtering power is applied in periodic pulses rather than continuously. During the 'on' phase, high power ionizes vaporized particles to improve coating density. During the 'off' phase, the target cools down preventing excessive temperature rise and material destruction. This periodic action resolves the contradiction by achieving high ionization efficiency without continuously exposing the target to destructive high power.
2Reliability
If very high sputtering power is used to increase ionized particles, then coating density improves, but target temperature increases dramatically destroying the target quickly
Solution Approach 1:
By applying sputtering power in periodic pulses with controlled duty cycles, the system achieves high ionization during the pulse phase while allowing cooling during the off-phase. This temporal separation enables high coating density without continuous thermal damage, extending target lifetime.
Solution Approach 2:
The cooling period is built into the pulsed cycle before the next high-power pulse begins. This preliminary cooling action prevents temperature accumulation that would otherwise lead to rapid target destruction, allowing sustained high-power operation for improved coating density.
3Duration of action of stationary object
If power is pulsed to prevent target destruction, then target lifetime is extended, but deposition rate decreases impacting coating economics
Solution Approach 1:
The patent optimizes pulsed DC parameters including pulse width, duty cycle, and peak power to achieve high ionization efficiency during the pulse phase. By carefully selecting these parameters, the system maximizes deposition rate during the active sputtering phase while maintaining acceptable target lifetime, improving overall coating economics.
Solution Approach 2:
The pulsed DC process maintains continuous ionized particle flux to the substrate during the pulse phase, ensuring high deposition efficiency. The off-phase is minimized or optimized so that the average deposition rate remains economically viable while still providing necessary cooling to extend target life.
4Temperature
If additional external pressure is applied to improve thermal contact, then target cooling efficiency improves, but device complexity and manufacturing cost increase
Solution Approach 1:
The patent integrates the cooling function directly into the target holder structure, merging the mechanical support function with the thermal management function. The holder is designed with high thermal conductivity materials and direct thermal contact surfaces, eliminating the need for separate pressure application mechanisms while achieving efficient target cooling.
Solution Approach 2:
The patent changes the thermal parameters of the holder system by using materials with high thermal conductivity and optimizing the contact surface geometry. This passive parameter optimization achieves efficient heat transfer from the target to the holder without requiring active pressure control mechanisms, reducing device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach simplifies and cost-reduces the target manufacturing process, enhances target durability and efficiency, and allows for the reuse of partially worn targets by ensuring excellent contact and efficient cooling, thereby improving the overall economics and performance of PVD coating processes.
Implementation Method 1
target material is added by thermal spray methods
Implementation Method 2
target material is added by conventional laser cladding
Implementation Method 3
target material is added by a 3D printing method
Implementation Method 4
conventional laser cladding, extreme high-speed laser cladding
Implementation Method 5
laser cladding... melt the target material onto the base plate
Implementation Method 6
An excellent thermal contact in this context means that between the plate provided to carry the target material and the plate of the holder to which the target is attached to and which is cooled, only a negligible temperature difference can be measured
Data Source
AI summary
Method for building up and/or finalizing a PVD target whereas the method comprises a process step where target material is added using an additive method.