PVD Target Protection Coating for Reactive Material Deposition
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Highly reactive physical vapor deposition (PVD) targets such as magnesium oxide (MgO) and lanthanum (La) quickly absorb water or oxidize when exposed to air, requiring lengthy burn-in processes to clean up water or oxidation, which reduces tool utilization and affects the quality of source material.
Innovation Solution
A physical vapor deposition tool with an independent evaporator module that applies a protective coating onto the target source within the vacuum chamber, using materials like Ti, Al, Si, or Cr to prevent water absorption and oxidation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If highly reactive PVD targets are exposed to air for target replacement or tool maintenance, then the target material can be accessed or replaced, but the target quickly absorbs water or oxidizes, requiring lengthy burn-in processes that reduce tool utilization
Solution Approach 1:
A transfer chamber is introduced as an intermediary between the PVD chamber and the loading chamber. This transfer chamber allows targets to be moved and handled without direct exposure to the PVD chamber atmosphere, eliminating the need for lengthy burn-in processes and maintaining target quality while enabling easy target replacement.
Solution Approach 2:
The vacuum system is segmented into separate functional chambers: a PVD chamber for deposition, a loading chamber for target storage and preparation, and a transfer chamber for moving targets between them. This segmentation allows each chamber to be optimized for its specific function while preventing contamination of the PVD chamber.
2Reliability
If lengthy burn-in processes are performed to clean water or oxidation on target surfaces, then target quality is improved, but the process takes significant time and reduces overall tool utilization
Solution Approach 1:
Targets are pre-prepared and stored in a controlled loading chamber atmosphere that prevents oxidation and water absorption before installation. This preliminary protection eliminates or significantly reduces the need for post-installation burn-in processes, saving time while maintaining target quality.
3Reliability
If the target source is exposed to oxygen and water in air, then the source material quality deteriorates and burns away more quickly, but protection mechanisms add device complexity
Solution Approach 1:
The transfer chamber serves as a protective intermediary that shields the target from oxygen and water during handling and installation. This single intermediary structure provides comprehensive protection without requiring complex active protection systems on the target itself.
Solution Approach 2:
The loading and transfer chambers maintain an inert or controlled atmosphere that prevents oxidation and water absorption on target surfaces. This passive environmental control is simpler than active protection mechanisms while effectively preserving source material quality.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The protective coating significantly extends the life of the target source by reducing the need for lengthy burn-in processes, improving tool utilization, and maintaining the quality of deposited materials.
Implementation Method 1
An evaporator module is independent of the physical vapor deposition module and is mounted within an enclosure in the vacuum chamber
Implementation Method 2
physical vapor deposition module including a target source within the vacuum chamber. The target source includes a target material for depositing on a workpiece
Data Source
AI summary
A deposition tool includes a vacuum chamber and a physical vapor deposition module including a target source in the vacuum chamber. The target source includes a target material for depositing on a workpiece. An evaporator module is independent of the physical vapor deposition module and is mounted within an enclosure in the vacuum chamber. A gate is configured to selectively open the enclosure to permit evaporation of a coating element to coat the target source in the physical vapor deposition module.