PVD Target Stabilizing Layer via High-Kinetic-Energy Spraying
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Solution Overview
Problem
The production of stable targets for PVD processes is complicated and costly, especially for brittle materials, due to difficulties in finding suitable support plates and joining methods, which can lead to thermal stress and deformation during use.
Innovation Solution
A target with a stabilizing layer applied via high-kinetic-energy spraying, which increases the strength and stiffness of the target plate, acting as a functional rear plate to prevent deformation and fracture, and enhances thermal conductivity for efficient heat removal.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional joining methods (welding, soldering, casting-on) are used to attach target plates to support plates, then the target can be assembled, but the joining stability is insufficient at high temperatures and the production process becomes complicated and costly
Solution Approach 1:
The target plate and support plate are merged into a single integrated component through direct sintering, eliminating the need for separate joining operations. This resolves the contradiction by achieving both high joining stability (through strong sintered bonds) and simplified production (by removing multiple assembly steps).
Solution Approach 2:
The invention uses composite material construction where target material and support material are combined through sintering to form a stable, integrated structure. This composite approach provides both the mechanical stability needed for high-temperature operation and a streamlined production process compared to conventional multi-step joining methods.
2Ease of manufacture
If soldering is used to join target plates to support plates, then assembly is achieved, but the connection becomes unstable above the melting point of the soldering material causing target plate detachment
Solution Approach 1:
The invention replaces expensive, temperature-limited soldering materials with a sintered joint that can withstand high temperatures. The sintered connection acts as a permanent, heat-resistant bond that eliminates the need for temperature-sensitive joining materials, resolving the contradiction between ease of manufacture and connection stability at high temperatures.
3Ease of manufacture
If target plates are produced by pressing and sintering or conventional metallurgy, then the target material can be formed, but finding suitable support plates and joining methods becomes difficult and costly
Solution Approach 1:
The sintering process serves multiple functions: it forms the target plate structure, creates the support plate structure, and simultaneously joins them together into a stable integrated unit. This multi-functional approach resolves the contradiction by making the production process adaptable to various target and support material combinations without requiring specialized joining methods for each material pair.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The stabilizing layer significantly increases the target's strength, stiffness, and thermal conductivity, reducing the likelihood of deformation and fracture, and simplifies the production process by creating a stable and durable target suitable for high-temperature PVD applications.
Implementation Method 1
The stabilizing layer has been applied to the target plate or produced thereon by means of high-kinetic-energy spraying of stabilizing material
Data Source
AI summary
A target includes a target plate and a stabilizing layer which is joined to the rear side of the target plate. The stabilizing layer was produced by high-kinetic-energy spraying of stabilizing material onto the target plate. A process for producing a target is also provided.