Self-Centering Vacuum Seal for PVD Sputter Leakage and Arcing
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Solution Overview
Problem
Existing vacuum seal systems in PVD sputter applications suffer from leakage, arcing events, oxidation, nodule formation, degradation, abrasion, and particle generation due to O-rings and vent slots, leading to unreliable vacuum integrity and system failure.
Innovation Solution
A vacuum seal system comprising a compressible sealing ring with protrusions and recesses, a rigid portion, and a removable plasma shield, which forms a self-centering seal without O-rings or vent slots, providing a buffer between the sputtering target and isolation ring, and incorporating a plasma shield for protection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If traditional O-ring and groove seal systems are used in PVD sputter applications, then the sealing structure is simple and easy to manufacture, but the system suffers from leakage, arcing events, oxidation, nodule formation, degradation, abrasion, and particle generation leading to unreliable vacuum integrity
Solution Approach 1:
The patent removes the traditional O-ring and groove components from the seal system. By extracting these problematic elements, the invention eliminates the sources of leakage, arcing, and particle generation while maintaining sealing functionality through an alternative flat surface contact mechanism between the sputtering target flange and the vacuum chamber
Solution Approach 2:
The seal system is divided into distinct functional zones: a sealed zone with flat surface contact between the sputtering target flange and vacuum chamber, and a vent zone with slots or scallops that allow controlled gas flow. This segmentation enables the system to maintain vacuum integrity in critical areas while providing controlled venting where needed
2Adaptability or versatility
If vent slots or scallops are incorporated into the sputtering target flange, then gas venting is improved, but leakage, arcing events, and particle generation occur compromising vacuum integrity
Solution Approach 1:
The vent slots or scallops are strategically positioned in specific local regions of the sputtering target flange where they provide necessary gas venting without compromising the overall sealing surface. This localized venting approach allows gas escape while maintaining vacuum integrity in the critical sealing zones
3Ease of repair
If a dynamic vacuum seal system without O-rings is implemented, then maintenance and replacement are simplified, but the sealing mechanism becomes more complex requiring precise compression control
Solution Approach 1:
The seal system is designed to be self-regulating through the compressible material's inherent properties. The material automatically adjusts its compression level based on the mechanical interface between the sputtering target flange and vacuum chamber, eliminating the need for manual adjustment or precise pre-compression settings during assembly
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system maintains vacuum integrity, prevents leakage and arcing, minimizes degradation, and ensures consistent sealing over the life of the sputtering target, enhancing the reliability and stability of PVD processes.
Implementation Method 1
The compressible portion may include two or more higher profile protrusions and two or more lower profile recesses that facilitate formation of a vacuum seal through compression by and between the isolation ring and the sputtering target
Implementation Method 2
The seal may further include a removable and replaceable plasma shield that is attachable to a first end of the seal
Data Source
AI summary
Provided is a vacuum seal and seal system including a corresponding isolation ring and a corresponding sputtering target. The seal and seal system may be used in PVD sputter applications. The seal may include a compressible portion and a rigid portion. The compressible portion may include two or more higher profile protrusions and two or more lower profile recesses that facilitate formation of a vacuum seal through compression by and between the isolation ring and the sputtering target. The seal may further include a removable and replaceable plasma shield that is attachable to a first end of the seal. The seal may further include a rim on a second end that selectively couples with a corresponding step-out portion of the isolation ring. The sputtering target may have a continuous peripheral flange surface. In an embodiment, the seal and seal system is self-centering.