Quartz Crystal Microbalance for Chemical Liquid Purity Measurement
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Solution Overview
Problem
Current methods for evaluating the purity of chemical liquids used in semiconductor manufacturing, such as those described in WO2017/169834A, are complex, time-consuming, and lack general-purpose properties, making it impractical to measure the purity of chemical liquids containing organic solvents frequently.
Innovation Solution
A method involving a crystal oscillator sensor that measures the change in resonance frequency upon contact with a chemical liquid containing an organic solvent, allowing for the determination of the liquid's purity by confirming if the change falls within a permissible range, and using this information to manage the purity of the chemical liquid for semiconductor device manufacturing and apparatus washing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a surface inspection device is used to measure the purity of chemical liquid, then measurement precision is improved, but device complexity and measurement time increase
Solution Approach 1:
The patent replaces the complex mechanical surface inspection device with a quartz crystal microbalance (QCM) sensor that uses piezoelectric oscillation to detect impurities. The QCM measures frequency changes when impurities adsorb onto the crystal surface, substituting mechanical/optical inspection with an electro-mechanical sensing approach that is simpler and faster.
Solution Approach 2:
The patent changes the measurement parameter from visual/physical surface inspection to frequency change detection. By monitoring the resonance frequency of the quartz crystal before and after chemical liquid contact, the system detects impurity adsorption through frequency shifts, providing a quantitative purity measurement method that is both precise and rapid.
2Measurement precision
If a surface inspection device is used to evaluate chemical liquid purity, then measurement precision is improved, but loss of time increases
Solution Approach 1:
The patent replaces time-consuming surface inspection procedures with rapid frequency-based detection using a quartz crystal microbalance. The measurement process involves simply contacting the crystal with the chemical liquid and recording frequency changes, eliminating lengthy preparation and analysis steps required by traditional inspection methods.
Solution Approach 2:
The patent performs preliminary calibration by measuring the frequency of the quartz crystal with pure chemical liquid before actual purity measurements. This preliminary action establishes a baseline frequency that enables rapid comparison and determination of impurity levels during subsequent measurements, reducing overall measurement time.
3Measurement precision
If traditional methods are used to manage chemical liquid purity, then measurement precision is improved, but ease of operation deteriorates
Solution Approach 1:
The patent implements a self-service purity management system where the quartz crystal automatically detects impurities through frequency changes when exposed to chemical liquids. The system requires minimal operator intervention - simply contact the crystal with the liquid and read the frequency measurement, eliminating complex manual inspection procedures while maintaining high precision.
Solution Approach 2:
The patent replaces manual purity assessment methods with automated frequency-based detection. The quartz crystal sensor provides direct, quantitative measurements of impurity levels through electronic frequency readings, substituting subjective or complex manual evaluation processes with objective, easy-to-read numerical data.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method simplifies the management of chemical liquid purity and the cleanliness of washing solutions, enabling more efficient semiconductor device manufacturing and apparatus washing by providing a straightforward and effective means to assess and maintain the purity of chemical liquids.
Implementation Method 1
bringing an oscillator into contact with a chemical liquid containing an organic solvent as a main component to obtain an amount of change in a resonance frequency of the oscillator resulting from the contact with the chemical liquid
Data Source
AI summary
Provided are a method of manufacturing a semiconductor device in which the purity of a chemical liquid containing an organic solvent is more easily managed, a method of washing a semiconductor manufacturing apparatus, and a simpler method of measuring the cleanliness of a washing solution. A method of manufacturing a semiconductor device has Step 1 of bringing an oscillator into contact with a chemical liquid containing an organic solvent as a main component to obtain the amount of change in the resonance frequency of the oscillator resulting from the contact with the chemical liquid, Step 2 of confirming whether or not the amount of change in the resonance frequency of the chemical liquid falls within a permissible range of the amount of change in the resonance frequency based on the preset purity of the chemical liquid, and Step 3 of using the chemical liquid confirmed in Step 2 in manufacturing a semiconductor device.