Quadrangular Pressure Control Valve for Semiconductor Substrate Processing
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Solution Overview
Problem
Existing pressure control valves for semiconductor substrate processing chambers have limited pressure control functionality due to restricted areas of circular fixed and pressure control holes, leading to inaccurate pressure control within the chamber.
Innovation Solution
A pressure control valve design featuring quadrangular fixed and pressure control holes, allowing for larger hole sizes and uniform control of the opening ratio by rotating the cylinder, thereby improving the accuracy of internal pressure control within the chamber.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If circular fixed holes and circular pressure control holes are used, then the valve structure is simple and easy to manufacture, but the areas of the holes are restricted leading to low pressure control functionality
Solution Approach 1:
The patent applies asymmetry by changing the hole shape from circular to quadrangular. This shape transformation allows the holes to have larger areas while maintaining ease of manufacture through standard machining processes. The quadrangular shape specifically enables better alignment between the fixed cylinder holes and rotating cylinder holes, improving pressure control functionality without complicating the manufacturing process.
2Device complexity
If circular fixed holes and circular pressure control holes are used, then the valve structure is simple, but the opening ratio changes sharply when rotating the cylinder causing inaccurate pressure control
Solution Approach 1:
The quadrangular shape introduces asymmetry that fundamentally changes the opening ratio behavior during rotation. Unlike circular holes that create sharp changes in opening ratio, the quadrangular configuration with its flat sides and corners provides a more gradual and predictable change in opening ratio as the rotating cylinder turns, thereby improving pressure control accuracy while keeping the device structure relatively simple.
Solution Approach 2:
The patent changes the geometric parameters of the holes from circular to quadrangular, which alters the mathematical relationship between rotation angle and opening ratio. This parameter change transforms the opening ratio variation from a sharp, non-linear change to a more controlled progression, enabling more accurate pressure control through the rotation mechanism.
3Device complexity
If the opening ratio is determined by partially overlapping circular holes, then the structure is simple, but the sharp change in opening ratio causes inaccurate pressure control
Solution Approach 1:
The quadrangular hole configuration changes the overlap geometry during rotation. The flat sides and defined corners of quadrangular holes create a more gradual and predictable overlap pattern compared to circular holes, reducing sharp transitions in opening ratio and thereby improving pressure control precision without increasing device complexity.
Data Source
AI summary
A pressure control valve may include a valve body, a fixed cylinder and a rotating cylinder. The valve body may have an inlet port and an outlet port. The fixed cylinder may be fixed to an inner wall of the valve body. The fixed cylinder may include a quadrangular first fixed hole connected to the inlet port, and a quadrangular second fixed hole connected to the outlet port. The rotating cylinder may be rotatably arranged in the fixed cylinder. The rotating cylinder may include a quadrangular first pressure control hole selectively connected to the first fixed hole, and a quadrangular second pressure control hole selectively connected to the second fixed hole. Thus, the pressure control valve including the quadrangular fixed hole and the quadrangular pressure control hole may have improved pressure control function.