Microfabricated Quadrupole Lens Segmentation for Mass Resolution

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Solution Overview

Problem

Miniature mass spectrometers face limitations in mass range, sensitivity, and noise levels due to RF heating and capacitative coupling issues in silicon-based electrostatic quadrupole mass filters, which restrict the voltage and frequency that can be applied, limiting both mass range and resolution.

Innovation Solution

The solution involves a microfabricated electrostatic quadrupole mass filter with electrodes mounted on insulating substrates, using conducting parts for alignment and support, and incorporating a Brubaker pre-filter to reduce fringing fields and capacitative coupling, while a conducting screen provides complete shielding to enhance sensitivity and resolution.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If silicon-based electrostatic quadrupole mass filters are used, then miniaturisation and cost reduction are achieved, but RF heating and capacitative coupling limit the voltage and frequency that can be applied, restricting mass range and resolution

Engineering Contradiction:
Improvedevice sizeVSAvoidmass range and resolution
Core Design Contradiction:
Volume of moving objectVSReliability

Solution Approach 1:

The quadrupole electrodes are segmented into multiple sections along their length, with each section independently controllable. This segmentation reduces capacitative coupling between adjacent electrodes by introducing insulating barriers between segments, thereby reducing RF heating while maintaining the miniaturized structure and improving mass range and resolution

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Insulating coatings or dielectric layers are introduced as intermediary materials between the silicon substrate and the quadrupole electrodes, or between adjacent electrode sections. These intermediaries reduce direct capacitative coupling and RF heating effects, enabling higher operating voltages and frequencies in the miniaturized device

Inventive Principle:
Principle #24Intermediary (Mediator)

2Volume of moving object

If the entrance pupil size is decreased, then device miniaturisation is achieved, but ion transmission is reduced

Engineering Contradiction:
Improvedevice sizeVSAvoidion transmission
Core Design Contradiction:
Volume of moving objectVSProductivity

Solution Approach 1:

A Brubaker pre-filter is introduced upstream of the main quadrupole filter to pre-collimate and guide ions into the entrance pupil. This preliminary action improves ion transmission efficiency by reducing angular dispersion before ions enter the miniaturized quadrupole, compensating for the reduced pupil size while maintaining compact dimensions

Inventive Principle:
Principle #10Preliminary action

3Productivity

If fringing fields at the input to the quadrupole are reduced, then ion transmission is improved, but additional components are required

Engineering Contradiction:
Improveion transmissionVSAvoidnumber of components
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The Brubaker pre-filter and main quadrupole filter are merged into a single integrated structure where the pre-filter electrodes are electrically connected to the main quadrupole electrodes. This merging reduces the number of separate components while maintaining improved ion transmission by reducing fringing fields at the input

Inventive Principle:
Principle #5Merging (Combining)

4Reliability

If higher voltages and frequencies are applied, then mass range and resolution are improved, but RF heating increases

Engineering Contradiction:
Improvemass range and resolutionVSAvoidRF heating
Core Design Contradiction:
ReliabilityVSTemperature

Solution Approach 1:

Segmenting the electrodes into multiple sections with insulating barriers between segments reduces capacitative coupling, thereby reducing RF heating and allowing higher operating voltages and frequencies to be applied, improving mass range and resolution

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The operating parameters (voltage and frequency) are optimized by changing the segmentation configuration and insulating barrier properties, allowing the system to operate at higher voltages and frequencies with reduced RF heating through modified electrical parameters

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach allows for higher mass range, reduced noise, and improved sensitivity by minimizing RF heating and capacitative coupling, enabling the application of higher voltages and frequencies, thus enhancing the overall performance of the mass spectrometer.

Implementation Method 1

travel parallel to the electrodes under the influence of a time-varying hyperbolic electrostatic field. This field contains both a direct current (DC) and an alternating current (AC) component

Methodology Applied
Scientific EffectElectrostatic field: Electric Field

Implementation Method 2

quadrupole electrostatic lens as a mass filter

Methodology Applied
Scientific EffectElectrostatic lens: Electrostatic Lens

Implementation Method 3

RF heating, caused by capacitative coupling between co-planar cylindrical electrodes through the oxide interlayer via the substrate

Methodology Applied
Scientific EffectCapacitative coupling: Capacitance

Data Source

PatentEP1953799B1High performance micro-fabricated quadrupole lens
Publication Date: 2013.06.26 MICROSAIC SYSTEMS PLC
  • EP1953799B1 patent drawingFigure 1
  • EP1953799B1 patent drawingFigure 2
  • EP1953799B1 patent drawingFigure 3

AI summary

This invention provides a method of aligning sets of cylindrical electrodes in the geometry of a miniature quadrupole electrostatic lens, which can act as a mass filter in a quadrupole mass spectrometer. The electrodes are mounted in pairs on microfabricated supports, which are formed from conducting parts on an insulating substrate. Complete segmentation of the conducting parts provides low capacitative coupling between co-planar cylindrical electrodes, and allows incorporation of a Brubaker prefilter to improve sensitivity at a given mass resolution. A complete quadrupole is constructed from two such supports, which are spaced apart by further conducting spacers. The spacers are continued around the electrodes to provide a conducting screen.