Quantum Device Assembly With Local Bump Heating for Qubit Protection

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Solution Overview

Problem

The challenge in manufacturing quantum devices is that heating the second bump to mount the first substrate over the second substrate can cause a change in the characteristics of the qubit chip due to temperature increase, which affects the qubit device's performance.

Innovation Solution

The method involves mounting the qubit chip over a first substrate using a first bump and then locally heating the second bump at a position not overlapping the qubit chip, without any joining member at that overlap, to minimize temperature increase and maintain the qubit chip's characteristics.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If the second bump is heated to mount the first substrate over the second substrate, then the mounting process can be completed, but the temperature increase causes a change in the characteristics of the qubit chip

Engineering Contradiction:
Improvemounting processVSAvoidqubit chip characteristics
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The heating process is segmented into localized regions. The heating apparatus applies heat only to the second bump region, separating the heating zone from the qubit chip region. This allows the mounting process to proceed while the qubit chip remains at a lower temperature, preventing characteristic changes.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent implements local heating where only the second bump area is heated to the required temperature for mounting. The qubit chip area maintains a different (lower) temperature. This local quality approach allows the mounting process to complete while preserving the temperature-sensitive characteristics of the qubit chip.

Inventive Principle:
Principle #3Local quality

2Device complexity

If the second bump is heated uniformly across the first substrate, then the mounting process is simplified, but the qubit chip temperature increases causing characteristic changes

Engineering Contradiction:
Improveheating processVSAvoidqubit chip temperature
Core Design Contradiction:
Device complexityVSTemperature

Solution Approach 1:

The heating process is divided into separate controlled zones. The heating apparatus is configured to heat only the second bump region, creating a segmented thermal profile across the first substrate. This segmentation enables simplified mounting at the bump location while maintaining lower temperatures at the qubit chip location.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent applies local quality by creating different thermal conditions in different regions of the first substrate. The second bump region experiences high temperature for mounting, while the qubit chip region experiences lower temperature to preserve characteristics. This spatial variation in thermal quality resolves the contradiction between mounting simplicity and temperature control.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach effectively suppresses the temperature rise of the qubit chip, thereby preserving its characteristics and ensuring accurate positioning during the mounting process.

Implementation Method 1

locally heating a second bump provided at a position that does not overlap the qubit chip in plan view

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentUS20250255197A1Method for manufacturing quantum device
Publication Date: 2025.08.07 FUJITSU LTD
  • US20250255197A1 patent drawing
  • US20250255197A1 patent drawing
  • US20250255197A1 patent drawing

AI summary

A method for manufacturing a quantum device, the method includes: mounting a qubit chip over a first substrate by using a first bump; and mounting the first substrate over a second substrate by, after mounting the qubit chip, locally heating a second bump provided at a position that does not overlap the qubit chip in plan view, wherein no joining member that joins the first substrate and the second substrate is provided between the first substrate and the second substrate at a position that overlaps the qubit chip in plan view.