Quantum Circuit Electrode Layout Without Substrate Flipping

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Solution Overview

Problem

Existing quantum electronic circuits face challenges in achieving high density and industrial production rates while minimizing circuit variability and interface defects, particularly due to complex architectures and alignment issues during the manufacturing of electrode arrays.

Innovation Solution

A quantum electronic circuit design featuring two electrode arrays on the same side of a semiconductor layer, eliminating the need for substrate flipping and reducing alignment problems, with conductive electrodes and vias strategically positioned to form control and coupling matrices without direct contact, maintaining crystalline continuity between the qubit layer and semiconductor pillars.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If substrate flipping and bonding is used to form two electrode arrays on opposite sides, then both arrays can be formed, but interface defects and alignment problems occur

Engineering Contradiction:
Improveformation of two electrode arraysVSAvoidinterface defects and alignment
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent transitions from a planar architecture where electrode arrays are formed on opposite sides of the substrate to a three-dimensional architecture where both electrode arrays are formed on the same side of the substrate at different heights. This dimensional change eliminates the need for substrate flipping and bonding, thereby avoiding interface defects and alignment problems while still enabling the formation of two complete electrode arrays.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Reliability

If dense matrices of interconnected quantum dots are used for tunnel coupling control, then coupling control is achieved, but device complexity increases

Engineering Contradiction:
Improvecoupling controlVSAvoidarchitecture complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent employs a three-dimensional architecture where quantum dots and electrode arrays are arranged in multiple layers at different heights. This vertical stacking allows tunnel coupling control to be achieved through controlled interactions between elements in different layers, reducing the need for extensive interconnections within a single plane and thereby simplifying the overall device architecture while maintaining coupling control capability.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Quantity of substance

If charge carrier reservoirs and charge detectors are integrated in the same plane as quantum dots, then planar simplicity is maintained, but density is limited

Engineering Contradiction:
Improvequantum dot densityVSAvoidarchitectural complexity
Core Design Contradiction:
Quantity of substanceVSDevice complexity

Solution Approach 1:

The patent integrates charge carrier reservoirs and charge detectors in the same plane as quantum dots by utilizing vertical stacking arrangements. This allows high-density integration of all components without increasing planar footprint, as elements are arranged in multiple layers along the vertical dimension rather than spreading out in the horizontal plane.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent implements a nested architecture where charge carrier reservoirs and charge detectors are positioned within or alongside the quantum dot structures in the vertical dimension. This nesting approach allows multiple functional elements to occupy the same lateral space at different heights, achieving high density while maintaining planar simplicity.

Inventive Principle:
Principle #7Nested doll (Nesting)

4Ease of manufacture

If parallel control circuits with reduced via density are used, then manufacturing is simplified, but qubit manipulation complexity increases

Engineering Contradiction:
Improvevia density reductionVSAvoidqubit manipulation
Core Design Contradiction:
Ease of manufactureVSEase of operation

Solution Approach 1:

The patent implements parallel control circuits with reduced via density by utilizing the third dimension for signal routing. Control signals are distributed through vertically stacked electrode arrays and conductive layers, allowing parallel control of multiple qubits with fewer vias in any single plane. The three-dimensional arrangement enables efficient signal distribution while maintaining ease of qubit manipulation through controlled electrostatic interactions.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design enhances manufacturing efficiency, reduces variability, and avoids interface defects, enabling the formation of high-density quantum dots with improved electrostatic control and reduced complexity in the circuit architecture.

Implementation Method 1

maintaining crystalline continuity between the qubit layer and semiconductor pillars

Methodology Applied
Scientific EffectCrystalline continuity:

Implementation Method 2

conductive electrodes and vias strategically positioned to form control and coupling matrices without direct contact, maintaining crystalline continuity

Methodology Applied
Scientific EffectElectrostatic control: Electrostatics

Data Source

PatentUS20240321893A1Quantum electronic circuit and method for manufacturing the same
Publication Date: 2024.09.26 COMMISSARIAT A LENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
  • US20240321893A1 patent drawing
  • US20240321893A1 patent drawing
  • US20240321893A1 patent drawing

AI summary

One aspect of the invention relates to an electronic circuit (1) comprising:a semiconductor layer (2), referred to as “qubit layer”;a separation layer (42) extending in contact with the qubit layer (2);first conductive electrodes (61), referred to as “coupling rows”, extending in parallel to the qubit layer (2);second conductive electrodes (62), referred to as “coupling columns”, extending in parallel to the qubit layer (2);third conductive electrodes (71), referred to as “control rows”, extending over the spacer (42); andconductive vias (72), referred to as “control vias”, extending perpendicularly to the face of the qubit layer (2) from the spacer (42) and having one end disposed in proximity to the qubit layer (2).