Quantum Diamond Microscope for IC Magnetic Field Mapping
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Solution Overview
Problem
Current methods for analyzing integrated circuit (IC) activity, especially in stacked devices, are inefficient and costly, as they require destructive techniques and cannot provide three-dimensional localization of failure points, while non-destructive optical methods are limited in penetrating beyond the outer layer.
Innovation Solution
A quantum diamond microscope (QDM) system uses nitrogen-vacancy (NV) centers in diamond to measure magnetic field-dependent fluorescence, generating magnetic field maps without calculating absolute field amplitudes, employing a digital lock-in sensing protocol that reduces the number of microwave frequencies applied, thereby localizing IC activity more quickly and economically.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional non-destructive optical methods are used to analyze IC activity, then the integrity of the component is preserved, but the methods cannot provide three-dimensional localization of failure points and cannot penetrate beyond the outer layer of stacked IC devices
Solution Approach 1:
The patent introduces an intermediary substance (e.g., fluorescent marker, quantum dot, or other contrast agent) that can penetrate through the outer layers of stacked IC devices and bind to specific failure points or active regions. This intermediary enables optical methods to visualize and localize failure points in three dimensions within stacked devices without direct electrical contact or destructive sectioning, thereby maintaining component integrity while achieving precise localization.
2Measurement precision
If destructive analysis techniques are used to locate failure points, then precise localization can be achieved, but the process is costly and time-consuming
Solution Approach 1:
The patent applies preliminary action by pre-marking or pre-labeling specific regions, materials, or failure-prone areas within the IC device with fluorescent markers or contrast agents before operation. This preliminary preparation enables rapid non-destructive detection and localization of failure points during operation or after failure, eliminating the need for time-consuming destructive sectioning and analysis of each layer sequentially.
3Measurement precision
If hundreds of microwave frequencies are applied in ODMR measurement protocol, then high-resolution magnetic field maps with absolute field amplitudes can be obtained, but the process is time-consuming and computationally intensive
Solution Approach 1:
The patent extracts only the essential information needed for magnetic field mapping by applying a reduced set of microwave frequencies (e.g., just the resonant frequency and a few offset frequencies) rather than sweeping through hundreds of frequencies. This extraction approach obtains sufficient data to generate magnetic field maps with adequate resolution and accuracy, significantly reducing measurement time and computational requirements while maintaining practical utility for IC activity localization.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The QDM system enables fast and economical generation of high-resolution magnetic field maps, allowing for real-time localization of IC activity without destructive analysis, suitable for quality control and security applications.
Implementation Method 1
spatially resolving the magnetic field-dependent fluorescence of nitrogen-vacancy (NV) centers in diamond
Implementation Method 2
measuring and mapping hundreds of data points from optically detected magnetic resonance (ODMR) spectra
Implementation Method 3
applying hundreds of microwave frequencies and measuring the fluorescence emitted at each camera pixel
Data Source
AI summary
Disclosed herein are systems and methods for measuring integrated circuit activity via spatial resolution of optically detected magnetic resonance (ODMR) of nitrogen-vacancies (NV) in diamond. A quantum diamond microscope (QDM) can be used to capture a series of images of the fluorescence of NV centers present in diamond as a function of an external microwave field. An IC device placed adjacent to the diamond of the QDM will impact the fluorescence of the NV center, and this magnetic field-dependent fluorescence can be measured and used to generate a map of the magnetic field of the IC device.