Quantum Dot Image Sensor Trench Integration

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Solution Overview

Problem

Current image sensors face limitations in low-light sensitivity and quantum efficiency due to their inability to effectively utilize the multiple exciton generation capability of quantum dots, which is crucial for enhancing sensitivity and efficiency in optical applications.

Innovation Solution

A quantum dot image sensor design is proposed, featuring a quantum dot layer disposed in a trench within a semiconductor material, electrically coupled to a p-n junction, where the quantum dots can generate multiple hole-electron pairs upon light absorption, and a capping layer to prevent contaminants and enhance charge transfer, allowing for improved image charge accumulation and sensitivity tuning based on quantum dot size.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional image sensors are used, then device structure is simple and manufacturing is easier, but low-light sensitivity and quantum efficiency are insufficient

Engineering Contradiction:
Improvelow-light sensitivityVSAvoidsensor structure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The sensor is divided into distinct functional layers: a quantum dot layer containing multiple exciton generation units, a charge transfer layer, and a readout layer. This segmentation allows each layer to be optimized for its specific function while maintaining overall system performance and enabling modular manufacturing approaches.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention employs composite material structures combining quantum dots with semiconductor matrices, integrating multiple materials with complementary properties to achieve high quantum efficiency and low-light sensitivity while managing the complexity through systematic material integration.

Inventive Principle:
Principle #40Composite materials

2Productivity

If quantum dot layer is added to enhance multiple exciton generation, then quantum efficiency improves, but manufacturing complexity increases

Engineering Contradiction:
Improvequantum efficiencyVSAvoidfabrication complexity
Core Design Contradiction:
ProductivityVSEase of manufacture

Solution Approach 1:

Quantum dots are pre-synthesized with controlled sizes and properties before being integrated into the sensor structure. This preliminary preparation allows for optimized quantum efficiency to be achieved while simplifying the main fabrication process, as the quantum dot layer can be deposited as a pre-formed functional unit.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The invention utilizes parameter changes in quantum dot size and composition to tune the bandgap and optimize multiple exciton generation. By controlling these parameters during quantum dot synthesis, high quantum efficiency is achieved without requiring complex in-situ fabrication processes.

Inventive Principle:
Principle #35Parameter changes

3Adaptability or versatility

If quantum dot size is varied to tune sensitivity, then optical response is optimized, but manufacturing precision requirements increase

Engineering Contradiction:
Improvesensitivity tuningVSAvoidquantum dot size control
Core Design Contradiction:
Adaptability or versatilityVSManufacturing precision

Solution Approach 1:

The invention systematically varies quantum dot size parameters to tune the optical response and sensitivity across different spectral regions. By establishing controlled synthesis protocols, the manufacturing precision challenge is transformed into a controllable parameter optimization process, enabling sensitivity tuning without excessive complexity.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

Different regions of the sensor can incorporate quantum dots with different size distributions tailored to specific spectral requirements. This local quality approach allows optimization of sensitivity for different wavelengths in different sensor regions while using standardized fabrication processes.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The design significantly enhances low-light sensitivity and quantum efficiency by leveraging multiple exciton generation in quantum dots, providing improved performance in image acquisition and optical applications.

Implementation Method 1

some quantum dots can convert a single photon into multiple hole-electron pairs, making them an attractive alternative semiconductor candidate in solar cell applications

Methodology Applied
Scientific EffectMultiple exciton generation: Photoelectric Effect

Implementation Method 2

a quantum dot layer disposed in a trench within a semiconductor material, electrically coupled to a p-n junction, where the quantum dots can generate multiple hole-electron pairs upon light absorption

Methodology Applied
Scientific EffectPhotoelectric effect: Photoelectric Effect

Data Source

PatentUS9881955B2Quantum dot image sensor
Publication Date: 2018.01.30 OMNIVISION TECHNOLOGIES INC
  • US9881955B2 patent drawing
  • US9881955B2 patent drawing
  • US9881955B2 patent drawing

AI summary

A photodetector includes a first doped region disposed in a semiconductor material and a second doped region disposed in the semiconductor material. The second doped region is electrically coupled to the first doped region, and the second doped region is of an opposite majority charge carrier type as the first doped region. The photodetector also includes a quantum dot layer disposed in a trench in the semiconductor material, and the quantum dot layer is electrically coupled to the second doped region. A transfer gate is disposed to permit charge transfer from the second doped region to a floating diffusion.