Quantum Dot Laser on Silicon for High-Yield Photonic Integration

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Solution Overview

Problem

The production of lasers is hindered by high costs and physical property limitations due to the materials and methods used, particularly when integrating lasers with other electrical or optical components.

Innovation Solution

A method involving bonding a thin film of III-V semiconductor material with a silicon substrate, removing excess material to form a base layer, and epitaxially growing a quantum dot layer at a predetermined height, which is then aligned with photonic elements to form a laser assembly.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If lasers are produced on specialized equipment using traditional materials and methods, then the physical properties of the lasers can be maintained, but the production cost increases and production yield decreases

Engineering Contradiction:
Improvephysical properties of lasersVSAvoidproduction yield
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The patent merges the laser fabrication process with standard semiconductor manufacturing processes, allowing lasers to be produced using conventional semiconductor equipment rather than specialized laser equipment. This is achieved by growing quantum dot layers and forming laser structures on semiconductor substrates using epitaxial growth techniques that are already established in the semiconductor industry, thereby increasing production yield while maintaining laser performance

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent makes the production equipment universal by using standard semiconductor manufacturing equipment for laser fabrication. The same equipment can produce both semiconductor devices and laser structures, eliminating the need for dedicated specialized equipment and enabling higher production volumes through shared manufacturing infrastructure

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Reliability

If traditional laser production methods are used, then the physical properties of lasers are maintained, but the production cost increases due to specialized equipment and materials

Engineering Contradiction:
Improvephysical properties of lasersVSAvoidproduction cost
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The patent combines laser fabrication with standard semiconductor manufacturing processes, utilizing existing semiconductor fabrication equipment and materials. This integration allows the production of lasers using conventional semiconductor manufacturing infrastructure, reducing the need for specialized equipment and materials while maintaining laser performance through controlled epitaxial growth of quantum dot structures

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent changes the manufacturing parameters by transitioning from traditional laser growth conditions to semiconductor-compatible processing parameters. This includes controlling epitaxial growth conditions, substrate temperatures, and material deposition rates to achieve laser-quality structures using semiconductor manufacturing parameters, thereby reducing production costs through equipment sharing

Inventive Principle:
Principle #35Parameter changes

3Adaptability or versatility

If lasers are integrated with other electrical or optical components using special techniques, then the integration can be achieved, but the production cost increases further

Engineering Contradiction:
Improveintegration capabilityVSAvoidproduction cost
Core Design Contradiction:
Adaptability or versatilityVSEase of manufacture

Solution Approach 1:

The patent merges laser structures with semiconductor devices and optical components on the same substrate using standard semiconductor fabrication techniques. This allows simultaneous fabrication of lasers, waveguides, modulators, and detectors using the same manufacturing process flow, eliminating the need for separate special techniques and reducing integration costs

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent segments the integrated photonic circuit into functional modules (laser sources, waveguides, modulators, detectors) that can be independently designed and fabricated using standard semiconductor processes, then integrated on a single chip. This modular approach enables versatile integration while maintaining compatibility with conventional manufacturing

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach results in lasers with superior physical properties and greater ease of manufacture, offering higher production yields compared to InP-based Quantum Well lasers or those grown from Si substrates.

Implementation Method 1

bonding a thin film of III-V semiconductor material with a silicon substrate

Methodology Applied
Scientific EffectMaterial bonding: Welding

Implementation Method 2

epitaxially growing a quantum dot layer at a predetermined height

Methodology Applied
Scientific EffectEpitaxial growth: Epitaxy

Data Source

PatentEP3759771B1Quantum dot lasers integrated on silicon submount with mechanical features and through-silicon vias
Publication Date: 2025.06.18 CISCO TECHNOLOGY INC
  • EP3759771B1 patent drawingFigure 1A~1C
  • EP3759771B1 patent drawingFigure 1D~1F
  • EP3759771B1 patent drawingFigure 1G

AI summary

There is provided a laser comprising a silicon substrate having a first surface and a second surface opposite to the first surface; a III-V semiconductor material layer, bonded with the first surface of the silicon substrate; and a quantum dot layer included in one or more layers grown from the III-V semiconductor material layer at a predetermined height relative to the first surface of the silicon substrate.