Siloxane-Coated Quantum Dot Resin for Fine Lithography Patterns

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Existing photosensitive resin compositions struggle to achieve high lithography resolution and favorable luminous properties, particularly in the context of miniaturized micro-LED displays, where further miniaturization and improved display clarity are demanded.

Innovation Solution

A photosensitive resin composition comprising a phenolic hydroxy group-containing silicone resin, a photo-acid generator, and a quantum dot with a surface coating layer containing siloxane, which enhances film formation and luminous properties.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional photosensitive resin compositions are used for lithography patterning, then the patterning process can be completed, but the lithography resolution is insufficient and luminous properties are compromised

Engineering Contradiction:
Improvelithography resolutionVSAvoidluminous properties
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

The patent employs a composite resin system combining epoxy resin and phenolic resin in specific ratios (epoxy resin 30-70 mass%, phenolic resin 70-30 mass%). This composite material approach allows the resin to simultaneously achieve high lithography resolution through proper curing characteristics and maintain favorable luminous properties by balancing the optical and mechanical contributions of each resin component.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The patent optimizes the molecular weight parameters of the resin components (epoxy resin 100-10,000, phenolic resin 100-10,000) and their mixing ratios to achieve the desired balance between lithography resolution and luminous properties. By carefully controlling these parameters, the composition attains both high patterning precision and optical performance.

Inventive Principle:
Principle #35Parameter changes

2Reliability

If the quantum dot content is increased to improve luminous properties, then luminous performance enhances, but the lithography resolution deteriorates

Engineering Contradiction:
Improveluminous propertiesVSAvoidlithography resolution
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The patent optimizes the quantum dot content within the specific range of 5-80 mass% to achieve the optimal balance between luminous properties and lithography resolution. This parameter optimization ensures that sufficient quantum dots are present for high luminous performance while maintaining the resin's ability to form high-resolution patterns during lithography processing.

Inventive Principle:
Principle #35Parameter changes

3Reliability

If the resin film strength is increased to improve reliability, then the cured film becomes more robust, but the lithography resolution and pattern fineness are compromised

Engineering Contradiction:
Improveresin film strengthVSAvoidpattern fineness
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The patent utilizes a composite resin system where epoxy resin provides strength and adhesion while phenolic resin contributes to lithography performance and pattern definition. This composite approach enables the cured film to simultaneously achieve high mechanical strength for reliability and fine pattern resolution for lithography applications.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The patent controls the molecular weight parameters of the resin components (both epoxy and phenolic resins within 100-10,000 range) to optimize the balance between film strength and pattern fineness. By adjusting these parameters, the resin achieves sufficient mechanical robustness while maintaining the ability to form fine lithographic patterns.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The composition enables the formation of films with high lithography resolution and favorable luminous properties, suitable for patterning processes and light emitting devices.

Implementation Method 1

a photo-acid generator

Methodology Applied
Scientific EffectPhotolysis: Photodissociation

Implementation Method 2

a phenolic hydroxy group-containing silicone resin

Methodology Applied
Scientific EffectPhotopolymerisation: Photopolymerisation

Implementation Method 3

a quantum dot, wherein the quantum dot has a surface coating layer containing siloxane

Methodology Applied
Scientific EffectPhotoluminescence: Photoluminescence

Data Source

PatentEP4600741A1Photosensitive resin composition, photosensitive resin coating, photosensitive dry film, pattern forming method, and light-emitting element
Publication Date: 2025.08.13 SHIN ETSU CHEMICAL CO LTD
  • EP4600741A1 patent drawing
  • EP4600741A1 patent drawing
  • EP4600741A1 patent drawing

AI summary

The present invention is a photosensitive resin composition including (A) a phenolic hydroxy group-containing silicone resin; (B) a photo-acid generator; and (C) a quantum dot, wherein the quantum dot has a surface coating layer containing siloxane. This can provide: a photosensitive resin composition capable of easily forming a film having high lithography resolution and favorable luminous properties; a photosensitive resin film obtained by using the photosensitive resin composition, and a photosensitive dry film; patterning processes using these; and a light emitting device obtained by using the photosensitive resin composition.