Quantum Dot Semiconductor Device Strain Control

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Solution Overview

Problem

Semiconductor optical amplifiers using quantum dots face challenges in improving crystallinity and reducing polarization dependency due to strain-induced degradation and anisotropic strain in quantum dots formed by S-K mode growth, as well as undesired compressive forces from barrier layers formed above the quantum dots.

Innovation Solution

A semiconductor device structure with a barrier layer and side barrier layer having specific lattice constants, where the quantum dots are sandwiched between these layers to control strain and enhance crystallinity, with the side barrier layer applying a tensile force to reduce polarization dependency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If quantum dots are formed by S-K mode growth, then the gain band is wide and pattern effect is small, but the crystallinity of the barrier layers is degraded due to strain

Engineering Contradiction:
Improvegain band widthVSAvoidcrystallinity
Core Design Contradiction:
Adaptability or versatilityVSStability of the object's composition

Solution Approach 1:

The patent applies local quality by creating asymmetric strain distribution through selective placement of compressive and tensile strain layers. The compressive strain layer is positioned at the bottom of quantum dots while tensile strain layers are placed at sides and top, creating localized strain zones that collectively improve crystallinity without compromising the overall quantum dot structure and gain band characteristics

Inventive Principle:
Principle #3Local quality

2Reliability

If barrier layers are formed at the upper side of quantum dots, then the quantum dots are enclosed, but compressive force acts on the upper side resulting in undesired effect on polarization dependency

Engineering Contradiction:
Improvequantum dot enclosureVSAvoidpolarization dependency
Core Design Contradiction:
ReliabilityVSEase of operation

Solution Approach 1:

The patent employs asymmetry by replacing the conventional symmetric barrier layer structure with an asymmetric configuration. Instead of placing identical compressive strain layers above and below quantum dots, the invention uses compressive strain layers only at the bottom and tensile strain layers at the sides and top, creating an asymmetric strain distribution that reduces polarization dependency while maintaining quantum dot enclosure

Inventive Principle:
Principle #4Asymmetry

Solution Approach 2:

The patent applies parameter changes by transforming the strain type from purely compressive to a combination of compressive and tensile strain. The barrier layers are modified to include tensile strain layers with specific lattice constants that differ from the compressive strain layers, changing the mechanical parameters acting on quantum dots to achieve better polarization characteristics

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The structure improves the crystallinity of the quantum dot layer and effectively controls strain, leading to enhanced luminescence intensity and reduced polarization dependency.

Implementation Method 1

the barrier layer, the quantum dots and the side barrier layer are configured so that a difference between a value of the first lattice constant and a value of the second lattice constant has a sign opposite to a sign of a difference between a value of the first lattice constant and a value of the third lattice constant

Methodology Applied
Scientific EffectStrain: Deformation

Implementation Method 2

a barrier layer of a semiconductor crystal having a first lattice constant and a quantum dot layer formed on the barrier layer including a plurality of quantum dots of a semiconductor crystal having a second lattice constant and a side barrier layer of a semiconductor crystal having a third lattice constant

Methodology Applied
Scientific EffectLattice mismatch:

Implementation Method 3

enhanced luminescence intensity

Methodology Applied
Scientific EffectLuminescence: Luminescence

Data Source

PatentUS7456422B2Semiconductor device
Publication Date: 2008.11.25 FUJITSU LTD
  • US7456422B2 patent drawing
  • US7456422B2 patent drawing
  • US7456422B2 patent drawing

AI summary

A semiconductor device including quantum dots comprises a barrier layer of a semiconductor crystal having a first lattice constant and a quantum dot layer including a plurality of quantum dots of a semiconductor crystal having a second lattice constant formed on the barrier layer and a side barrier layer of a semiconductor crystal having a third lattice constant, which is formed in contact with the side faces of the plurality of quantum dots, in which the barrier layer, the quantum dots and the side barrier layer are configured so that the difference between the values of the first lattice constant and the second lattice constant has a sign opposite to that of the difference between values of the first lattice constant and the third lattice constant.