Quantum Dot Semiconductor Device Strain Management

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Solution Overview

Problem

Columnar quantum dots stacked with a spacer layer of about 40 nm suffer from deteriorated crystallinity due to compressive strains, leading to reduced photoluminescence intensity and inappropriate polarization characteristics, as the strain distribution within the quantum dots is altered by the barrier layer used for strain compensation.

Innovation Solution

A quantum dot semiconductor device structure is proposed, where a multilayer quantum dot is formed with a third barrier layer to manage local strains and a fourth barrier layer to compensate residual strains, ensuring that the strain distribution is optimized, thereby maintaining high crystallinity and polarization independence.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If columnar quantum dots are stacked with a spacer layer of about 40 nm to achieve polarization independence, then sufficient gains are secured, but crystallinity deteriorates and photoluminescence intensity decreases

Engineering Contradiction:
Improvepolarization independenceVSAvoidcrystallinity
Core Design Contradiction:
Adaptability or versatilityVSStability of the object's composition

Solution Approach 1:

The barrier layer is divided into two distinct functional layers: a first barrier layer in contact with the quantum dot that maintains local strain distribution, and a second barrier layer that compensates residual strains. This segmentation allows each layer to perform its specific function without interfering with the other, resolving the contradiction between maintaining crystallinity and achieving strain compensation for polarization independence.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the barrier structure are assigned different strain properties: the first barrier layer preserves the local compressive strain necessary for quantum dot polarization characteristics, while the second barrier layer provides tensile strain to compensate residual strains. This local quality differentiation enables simultaneous maintenance of crystallinity and achievement of polarization independence.

Inventive Principle:
Principle #3Local quality

2Stability of the object's composition

If a barrier layer is used for strain compensation in columnar quantum dots, then residual strains are compensated, but local strain distribution within the quantum dot is altered and polarization characteristics change inappropriately

Engineering Contradiction:
Improvestrain compensationVSAvoidpolarization characteristic
Core Design Contradiction:
Stability of the object's compositionVSAdaptability or versatility

Solution Approach 1:

The barrier layer is segmented into two functional parts: the first barrier layer that maintains local strain distribution by being in direct contact with the quantum dot, and the second barrier layer that compensates residual strains without affecting the quantum dot's local strain environment. This segmentation resolves the contradiction by separating the strain compensation function from the local strain maintenance function.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The first barrier layer acts as an intermediary between the quantum dot and the second barrier layer, protecting the quantum dot from direct exposure to the strain-compensating second barrier layer. This intermediary structure allows residual strain compensation while preserving the local strain distribution necessary for proper polarization characteristics.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Productivity

If multiple quantum dot layers are stacked to increase gain, then polarization independence is achieved, but strain accumulation exceeds critical film thickness and dislocation occurs

Engineering Contradiction:
ImprovegainVSAvoidstrain relaxation
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The barrier structure is segmented into two layers with distinct functions: the first barrier layer maintains local strain for quantum dot stability, while the second barrier layer compensates accumulated residual strains from multiple quantum dot layers. This segmentation enables stacking of multiple quantum dot layers to increase gain while preventing strain-induced dislocations through active strain compensation.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The proposed structure effectively maintains high crystallinity and improves photoluminescence intensity by managing strain distribution, ensuring sufficient gains without polarization dependence, as demonstrated by experimental results showing improved performance compared to single-layer columnar quantum dots.

Implementation Method 1

the columnar quantum dots undergo compressive strains so as to achieve a lattice matching with a substrate

Methodology Applied
Scientific EffectCompressive strain: Deformation

Implementation Method 2

strain relaxation with generation of dislocation is generated in a crystal

Methodology Applied
Scientific EffectStrain relaxation: Stress Relaxation

Implementation Method 3

a fourth barrier layer formed on the third barrier layer, which compensates residual strains in the multilayer quantum dot

Methodology Applied
Scientific EffectStrain compensation: Elasticity

Implementation Method 4

photoluminescence intensity decreases

Methodology Applied
Scientific EffectPhotoluminescence: Photoluminescence

Data Source

PatentUS7875875B2Semiconductor device and manufacturing method thereof
Publication Date: 2011.01.25 FUJITSU LTD
  • US7875875B2 patent drawing
  • US7875875B2 patent drawing
  • US7875875B2 patent drawing

AI summary

A quantum dot semiconductor device securing sufficient gains without depending on polarization and a manufacturing method thereof. On a first barrier layer, a multilayer quantum dot is formed by repeatedly stacking alternately a quantum dot layer and a second barrier layer. On a quantum dot layer as an uppermost layer of the quantum dot, a third barrier layer which keeps local strains in the quantum dot layer is formed. On the third barrier layer, a fourth barrier layer which compensates compressive strains from the second barrier layer is formed. Therefore, the fourth barrier layer made of tensile strain materials compensates accumulation of compressive strains caused by stacking of a multilayer quantum dot layer. The third barrier layer prevents tensile strains in the fourth barrier layer from directly impacting on the quantum dot layer, so that local strains can be effectively cancelled. Thus, the above-described semiconductor device can be realized.