Quantum Well Metaoptic for Fast Phase and Reflectance Modulation

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Solution Overview

Problem

Existing optical modulation devices have limited operation response time and modulation efficiency due to their driving methods, and there is a need for improved metaoptics that can achieve high reflectance, large phase shifts, and high quality factors in specific wavelength bands.

Innovation Solution

A metaoptic design incorporating a plurality of meta units with semiconductor layers and active layers having multiple quantum well structures, where voltages applied to these layers change refractive indices, enabling Mie and guided mode resonances for high reflectance and phase shifts, and a DBR layer for enhanced performance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If conventional light modulation devices (liquid crystals, MEMS) are used, then optical modulation is achieved, but operation response time is limited

Engineering Contradiction:
Improveoperation response timeVSAvoiddevice structure complexity
Core Design Contradiction:
SpeedVSDevice complexity

Solution Approach 1:

The patent replaces mechanical or liquid crystal-based modulation systems with a meta-optic system using semiconductor layers and quantum well structures. The active layer with multiple quantum wells enables direct electrical control of optical properties through carrier injection, eliminating mechanical moving parts and liquid crystal molecules, thus achieving faster response times while maintaining manageable device complexity through integrated semiconductor fabrication processes.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the fundamental operating parameter from liquid crystal orientation or MEMS mechanical displacement to semiconductor carrier concentration and refractive index. By injecting carriers into the active layer, the refractive index is dynamically tuned, enabling rapid optical modulation. This parameter change allows response times to be determined by carrier injection speed rather than mechanical or molecular reconfiguration time.

Inventive Principle:
Principle #35Parameter changes

2Productivity

If meta-structures with dimensions less than wavelength are used, then resonance conditions can be controlled, but modulation efficiency needs improvement

Engineering Contradiction:
Improvemodulation efficiencyVSAvoidmeta-structure dimensional precision
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The patent employs a composite structure combining semiconductor materials with quantum well layers within the meta-unit architecture. This composite approach enables strong optical resonance (Mie and guided mode resonances) at relaxed dimensional tolerances because the quantum well structures provide enhanced light-matter interaction. The composite material system achieves high modulation efficiency without requiring extremely precise nanofabrication, as the resonance conditions are reinforced by the quantum well optical properties.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The patent exploits optical resonance phenomena (Mie resonance and guided mode resonance) analogous to mechanical vibration principles. By designing meta-units with specific geometries that support resonant modes, the structure amplifies light-matter interaction at targeted wavelengths. This resonance enhancement significantly improves modulation efficiency, allowing effective operation even with moderate manufacturing precision, as the resonant coupling compensates for dimensional variations.

Inventive Principle:
Principle #18Mechanical vibration

3Reliability

If high reflectance and large phase shifts are achieved through resonance, then quality factor increases, but device structure becomes more complex

Engineering Contradiction:
Improvequality factorVSAvoidmeta-unit structure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent merges multiple functional elements into a single integrated meta-unit structure: the semiconductor layer, active quantum well layer, and patterned geometry are combined in one compact unit. This unified structure simultaneously provides the resonant cavity for high Q-factor operation and the active region for electrical modulation. The merged design achieves high reflectance and large phase shifts without requiring separate components, thereby maintaining manageable device complexity while achieving high reliability through resonant enhancement.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The metaoptic achieves reflectance greater than 90% and phase shifts greater than π rad, with high modulation efficiency and quality factors, allowing for efficient light modulation and beam steering.

Implementation Method 1

an active layer provided on the first semiconductor layer, the active layer having a multiple quantum well structure and a refractive index variable based on a voltage applied thereto

Methodology Applied
Scientific EffectElectro-optic effect: Electro-Optic Effects

Implementation Method 2

The plurality of first elements may be configured such that the incident light undergoes Mie resonance

Methodology Applied
Scientific EffectMie resonance: Resonance

Implementation Method 3

the plurality of first elements and the plurality of second elements may be configured such that the incident light undergoes guided mode resonance in the first direction

Methodology Applied
Scientific EffectGuided mode resonance: Resonance

Implementation Method 4

The metaoptic may further include a distributed Bragg reflector (DBR) layer provided on a side of the plurality of meta units

Methodology Applied
Scientific EffectBragg reflection: Bragg Diffraction

Data Source

PatentUS12578616B2Metaoptics and electronic apparatuses including the same
Publication Date: 2026.03.17 SAMSUNG ELECTRONICS CO LTD
  • US12578616B2 patent drawing
  • US12578616B2 patent drawing
  • US12578616B2 patent drawing

AI summary

Provided is a metaoptic configured to modulate incident light in a wavelength band, the metaoptic including a plurality of meta units respectively including a first semiconductor layer, an active layer provided on the first semiconductor layer, the active layer having a multiple quantum well structure and a refractive index variable based on a voltage applied thereto, and a second semiconductor layer provided on the active layer and doped with a polarity opposite to a polarity of the first semiconductor layer, wherein at least one of the plurality of meta units includes a plurality of first elements having a cylindrical shape and periodically provided spaced apart from each other in a first direction, and a plurality of second elements connecting the plurality of first elements to each other, and wherein the plurality of meta units are provided in a second direction that is perpendicular to the first direction.