Quartz Vibrator Beam Layout for Unnecessary Vibration Attenuation
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Solution Overview
Problem
Existing vibrator devices face limitations in preventing unnecessary vibrations due to restricted beam shapes, which restrict frequency design and vibration isolation efficiency.
Innovation Solution
The vibrator device incorporates a support substrate with a specific configuration of beams and supports that satisfy relationships between resonance and drive frequencies, and spring constants, along with a quartz crystal substrate for both the vibrator and support elements, to effectively attenuate unnecessary vibrations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If beam portions are formed to fill in a gap of the vibrator body, then the vibrator body is supported, but the shape of the beam portions is limited and frequency design of unnecessary vibration is restricted
Solution Approach 1:
The support substrate is divided into a base and a support portion that are separated spatially. The beam couples these segmented parts, allowing independent optimization of the vibrator body support and the frequency characteristics of the unnecessary vibration, thus resolving the contradiction between support stability and frequency design flexibility.
Solution Approach 2:
The support structure is extended into a separate spatial dimension by positioning the support portion at a location different from the base in the plan view. This dimensional separation allows the beam to be designed with optimal frequency characteristics while still providing stable support to the vibrator body.
2Stability of the object's composition
If beam portions are formed to fill in a gap of the vibrator body, then the vibrator body is supported, but it is difficult to implement a vibrator element in which the unnecessary vibration is sufficiently prevented
Solution Approach 1:
By segmenting the support substrate into base and support portion with a beam connecting them, the design enables independent optimization of vibration suppression characteristics. The beam can be specifically designed to filter unnecessary vibrations while the support portion provides stable support to the vibrator body.
Solution Approach 2:
The beam is designed with specific dimensional parameters (length, width, thickness) that are optimized to achieve desired frequency characteristics. By changing these parameters, the beam can be tuned to suppress unnecessary vibrations at specific frequencies while maintaining support functionality.
3Adaptability or versatility
If a support substrate with separated base and support is used, then frequency design freedom is improved, but device complexity increases
Solution Approach 1:
The base, beam, and support portion are merged into a single integrated support substrate component. This merging reduces device complexity by eliminating the need for separate parts and assembly steps, while still maintaining the frequency design freedom provided by the separated base and support structure.
Solution Approach 2:
The support substrate serves multiple functions: it provides mechanical support to the vibrator body, acts as a frequency filter for unnecessary vibrations, and provides a stable mounting platform. This multi-functionality reduces the need for additional components, thereby reducing overall device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration reduces displacement amplitude magnification of unnecessary vibrations to less than 0.8, enhancing vibration isolation and maintaining mechanical strength, thereby improving the overall vibration characteristic of the device.
Implementation Method 1
Ka is a spring constant of an elastic deformation of the beam along the A axis and Kb is a spring constant of an elastic deformation of the beam along the B axis
Implementation Method 2
vibrating arms configured to flexurally vibrate along a plane parallel to the A axis and the B axis and along the A axis
Implementation Method 3
a relationship f0>f1 in which a frequency of the unnecessary vibration is fd, a resonance frequency of a vibration of a support substrate along the B axis is f0, and a drive frequency of the vibrator element is f1
Data Source
AI summary
Provided is a vibrator device including a vibrator structure body. When the A axis, the B axis, and the C axis are three axes orthogonal to each other, the vibrator structure body includes a vibrator element and a support substrate that is aligned with the vibrator element along the C axis. The vibrator element includes vibrating arms configured to flexurally vibrate along a plane parallel to the A axis and the B axis and along the A axis. The support substrate includes a base that supports the vibrator element, a support that supports the base, and a beam that couples the base and the support. A relationship f0<f1 is satisfied in which f0 is a resonance frequency of a vibration of the vibrator structure body along the B axis and f1 is a drive frequency of the vibrator element.