Quartz Crucible Outer Layer for High-Temperature Pulling Stability

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Solution Overview

Problem

Quartz glass crucibles used in silicon single-crystal production face durability issues due to deformation during long-duration crystal pulling-up steps, particularly at high temperatures, necessitating improved crystallization and structural reinforcement.

Innovation Solution

A quartz glass crucible with a semi-molten layer featuring recesses, including through-holes, promotes crystallization on its outer surface, enhancing durability by forming a thick crystal layer, and a two-layer structure with a transparent and bubble-containing layer to withstand high temperatures and prevent deformation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If the temperature of the crucible increases during pull-up, then the viscosity of the glass decreases, but the crucible may be deformed during use

Engineering Contradiction:
Improvecrucible temperatureVSAvoidcrucible strength
Core Design Contradiction:
TemperatureVSStrength

Solution Approach 1:

A semi-molten layer consisting of unmolten or semi-molten quartz powder is formed on the outer surface of the crucible before use. This preliminary layer serves as a protective barrier that promotes crystallization during heating, forming a thick crystal layer that strengthens the crucible wall and prevents deformation at high temperatures during the pull-up process.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The crucible employs a composite structure with an inner transparent glass layer and an outer layer containing a semi-molten quartz powder layer. This composite material approach combines the heat resistance of quartz glass with the structural reinforcement provided by the semi-molten layer that crystallizes during use, creating a multi-functional structure that resists thermal deformation.

Inventive Principle:
Principle #40Composite materials

2Strength

If a crystallization accelerator is applied onto or incorporated into a surface of a crucible, then glass is crystallized at a high temperature to increase the strength of the crucible, but further improvement of the durability is required

Engineering Contradiction:
Improvecrucible strengthVSAvoidcrucible durability
Core Design Contradiction:
StrengthVSReliability

Solution Approach 1:

The invention changes the physical and chemical parameters of the outer surface by incorporating a semi-molten layer with specific characteristics (unmolten or semi-molten quartz powder with controlled particle size and composition). This layer undergoes controlled crystallization during heating, transforming from a semi-molten state to a crystalline structure that provides enhanced strength and durability, going beyond simple crystallization accelerator application.

Inventive Principle:
Principle #35Parameter changes

3Reliability

If the thickness of the crystal layer is increased, then the durability of the crucible is improved, but the production process becomes more complex

Engineering Contradiction:
Improvecrucible durabilityVSAvoidproduction process complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The semi-molten layer on the crucible outer surface performs self-service by automatically crystallizing during the normal heating process of the pull-up operation. The crystallization occurs in-situ during use, forming the protective thick crystal layer without requiring separate crystallization treatment equipment or additional processing steps, thereby improving durability while avoiding production process complexity.

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The enhanced crucible design allows for long-duration crystal pulling-up, producing high-quality silicon single crystals with improved strength and resistance to deformation, reducing dislocation and pinhole formation.

Implementation Method 1

a semi-molten layer consisting of a fusion-bonded layer of unmolten or semi-molten quartz powder formed on an outer side of an outer surface of the crucible main body

Methodology Applied
Scientific EffectCrystallization: Crystallisation

Implementation Method 2

the outer side portion (outer layer) is formed of a bubble-containing layer including a number of bubbles in order to disperse the radiant heat from the outside to uniformly heat the inside of the crucible

Methodology Applied
Scientific EffectThermal radiation: Thermal Radiation

Implementation Method 3

The inner side portion (inner layer) of the quartz glass crucible is formed of a transparent glass layer, which comes into contact with the silicon melt and thus contains substantially no bubbles

Methodology Applied
Scientific EffectSurface tension: Surface Tension

Data Source

PatentUS20260035829A1Quartz glass crucible for silicon single-crystal pulling and manufacturing method utilizing same
Publication Date: 2026.02.05 SUMCO CORP
  • US20260035829A1 patent drawing
  • US20260035829A1 patent drawing
  • US20260035829A1 patent drawing

AI summary

A quartz glass crucible includes a crucible main body consisting of silica glass, and a semi-molten layer consisting of a fusion-bonded layer of unmolten or semi-molten quartz powder formed on the outer side of an outer surface of the crucible main body. A number of recesses having a diameter of 0.2 mm or more and 5.0 mm or less and a depth of 50 μm or more are formed on a surface of the semi-molten layer. Some of the recesses are through-holes penetrating the semi-molten layer to reach an outer surface of the crucible main body, and the density of the through-holes is 1 through-hole/cm2 or more and 50 through-holes/cm2 or less.