Quartz Crucible Use Time Optimization for Single Crystal Growth

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Solution Overview

Problem

The quartz crucibles used in the Czochralski method for growing silicon single crystals undergo devitrification due to high temperature exposure, leading to reduced elasticity, potential cracks, and melt leakage, which increases manufacturing costs and reduces operational efficiency.

Innovation Solution

By examining the correlation between the Al to Li concentration ratio in the quartz raw material powder, the devitrification ratio, and the occurrence of melt leakage, a method is established to set a range for the devitrification ratio and determine the maximum use time of the quartz crucible to prevent melt leakage, allowing for extended use and efficient growth of single crystals.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If the quartz crucible is used for an extended period to increase productivity, then the manufacturing efficiency improves, but the devitrification of the quartz crucible progresses leading to reduced elasticity and potential melt leakage

Engineering Contradiction:
Improveoperation time for growing single crystalVSAvoidstructural integrity of quartz crucible
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The patent applies preliminary action by measuring the Al and Li concentrations in the quartz raw material powder before crucible manufacturing, and using these measurements to predetermined the maximum use time for each crucible. This advance preparation allows each crucible to be used optimally without requiring real-time monitoring during operation, thereby extending productive use while preventing melt leakage.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent utilizes parameter changes by establishing a mathematical relationship between the Al/Li concentration ratio in the raw material, the use time, and the devitrification ratio. By measuring the chemical composition parameters and applying the predetermined formula, the maximum safe use time is calculated, optimizing both productivity and reliability.

Inventive Principle:
Principle #35Parameter changes

2Reliability

If the operation time is reduced to prevent devitrification and melt leakage, then the reliability is maintained, but the productivity and manufacturing efficiency decrease

Engineering Contradiction:
Improveprevention of melt leakageVSAvoidoperation time for growing single crystal
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The patent applies parameter changes by using the measured Al and Li concentration values to calculate a specific maximum use time for each crucible through the predetermined relationship. This customized time parameter allows each crucible to be used for the maximum possible duration without melt leakage, optimizing both reliability and productivity individually for each crucible.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The crucible essentially serves itself by having its maximum use time predetermined based on its own raw material composition characteristics. The Al and Li concentration measurements provide crucible-specific information that determines its optimal service life, allowing each crucible to be utilized to its full potential without requiring conservative uniform time limits applied to all crucibles.

Inventive Principle:
Principle #25Self-service

3Reliability

If a uniform operation time limit is applied to all quartz crucibles to prevent melt leakage, then the reliability is ensured, but the productivity is reduced due to premature replacement of crucibles with slower devitrification rates

Engineering Contradiction:
Improveprevention of melt leakageVSAvoidinefficient use of quartz crucible
Core Design Contradiction:
ReliabilityVSLoss of time

Solution Approach 1:

The patent applies local quality by treating each quartz crucible individually based on its specific Al and Li concentration characteristics. Instead of applying a uniform time limit to all crucibles, each crucible receives a customized maximum use time determined by its own compositional properties. This localized approach ensures that crucibles with slower devitrification rates are not prematurely replaced, optimizing overall productivity while maintaining reliability.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

Each crucible determines its own optimal service life based on its inherent Al and Li concentration ratio. The predetermined relationship allows each crucible to 'self-regulate' its maximum use time according to its own devitrification characteristics, eliminating the waste associated with uniform conservative time limits while ensuring none exceed their safe operational boundaries.

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach prevents melt leakage, extends the operational time for growing single crystals, increases yield, and reduces the cost of silicon single crystals by efficiently using quartz crucibles, with a devitrification ratio set to 80% or less to prevent cracking.

Implementation Method 1

the heat from the heater transferred via the graphite crucible

Methodology Applied
Scientific EffectHeat conduction: Conduction (thermal)

Implementation Method 2

the quartz glass is crystallized from the outer surface side contacting to the graphite crucible with high temperature

Methodology Applied
Scientific EffectCrystallization: Crystallisation

Implementation Method 3

the crystallized part got to contain innumerable microscopic cracks due to thermal shrinkage of the quartz

Methodology Applied
Scientific EffectThermal shrinkage: Thermal Contraction

Implementation Method 4

the quartz crucible tends to contain cracks by thermal expansion or thermal shrinkage due to temperature change

Methodology Applied
Scientific EffectThermal expansion: Thermal Expansion

Data Source

PatentUS9863060B2Method for manufacturing single crystal
Publication Date: 2018.01.09 SHIN ETSU HANDOTAI CO LTD
  • US9863060B2 patent drawing
  • US9863060B2 patent drawing
  • US9863060B2 patent drawing

AI summary

Method for manufacturing a single crystal according to a CZ method, including: pre-examining a correlation between an Al/Li ratio in a quartz raw material powder used for producing the quartz crucible, a use time of the crucible, a devitrification ratio at the use time, and occurrence or nonoccurrence of melt leakage attributable to the devitrification part; setting a range of the devitrification ratio of the quartz crucible in order not to generate the melt leakage, and determining a maximum use time of the quartz crucible according to the Al/Li ratio so as to fall within the set range of the ratio, on the basis of the correlation; and growing the single crystal by using the quartz crucible in the range of the maximum use time. This provides a manufacturing method which can efficiently use a quartz crucible to grow a single crystal while preventing occurrence of melt leakage.