Quartz Glass Plate Adhesive Layer UV Resistance
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Solution Overview
Problem
In photolithography and ultraviolet ray irradiation applications, quartz glass plates with high heat and UV resistance are needed to prevent defects and ensure precise uniform irradiation, but existing materials face challenges with adhesive strength degradation and precision issues due to UV exposure and thermal expansion.
Innovation Solution
A quartz glass plate with an adhesive layer containing silica, where the sum of Li, Na, and K ions, and Ca ions is 10 ppm by mass or less, providing a birefringence of 100 nm/cm or less and an adhesive strength of 10 kgf/cm2 or more, ensuring uniform thickness and resistance to UV-induced damage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If an ultraviolet curable resin is used as an adhesive to adhere the pellicle plate and frame, then the adhesion is initially strong, but the adhesive strength is degraded by ultraviolet ray exposure, causing peeling and deformation
Solution Approach 1:
The patent changes the chemical composition parameters of the adhesive layer by strictly controlling the sum of alkali metal ions (Li, Na, K) and alkaline earth metal ions (Ca) to be 10 ppm by mass or less. This parameter control prevents UV-induced degradation while maintaining strong adhesion between the quartz glass plate body and quartz glass member.
Solution Approach 2:
The patent uses a composite adhesive layer made primarily of silica with controlled impurity content. This composite material approach combines the benefits of strong adhesion with high UV and heat resistance, resolving the contradiction between initial bond strength and long-term stability under UV exposure.
2Manufacturing precision
If conventional methods (HF etching, sandblasting, grinding) are used to form steps on the quartz glass plate, then the steps can be formed, but it is difficult to control the height uniformity, causing variation in the gap between the object and ultraviolet ray light source
Solution Approach 1:
The patent applies preliminary action by forming the step structure through the adhesive layer configuration before final UV irradiation. The adhesive layer is designed with specific thickness and composition to create the step structure in advance, ensuring uniform height and gap control without requiring post-processing adjustments.
Solution Approach 2:
The adhesive layer serves as an intermediary element that enables precise step formation. By controlling the adhesive layer's thickness and composition, the patent achieves precise gap control between the object and UV light source, mediating between the quartz glass plate body and the treatment object.
3Strength
If the adhesive layer contains high concentrations of alkali metal ions and alkaline earth metal ions, then the adhesion may be strong initially, but the quartz glass plate becomes susceptible to fracture and deformation under ultraviolet ray irradiation
Solution Approach 1:
The patent changes the impurity content parameters of the adhesive layer by limiting the sum of alkali metal ions (Li, Na, K) and alkaline earth metal ions (Ca) to 10 ppm by mass or less. This parameter optimization maintains adhesive strength while eliminating UV-induced fracture susceptibility.
Solution Approach 2:
The patent converts the potential harm of impurity-containing adhesives into benefit by using ultra-pure silica-based adhesive with controlled impurity levels. The strict impurity control transforms what would be harmful contaminants into a feature that enhances UV and heat resistance while maintaining adhesion.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution allows for the formation of uniform steps and prevents damage from UV or heat exposure, ensuring precise and uniform UV irradiation while maintaining high adhesive strength and resistance to distortion.
Implementation Method 1
the sum of concentrations of Li, Na, and K ions, being alkali metal ions and Ca ions, being alkaline earth metal ions contained in the adhesive layer is 10 ppm by mass or less
Implementation Method 2
a quartz glass that can transmit a deep ultraviolet ray is used as a window plate
Implementation Method 3
the quartz glass plate body adhered to the quartz glass member through the adhesive layer preferably has a birefringence of 100 nm/cm or less when irradiated with an ultraviolet ray
Data Source
AI summary
A quartz glass plate has a quartz glass plate body and a quartz glass member adhered to the quartz glass plate body through an adhesive layer, where the adhesive layer contains silica, and a sum of concentrations of Li, Na, and K ions, being alkali metal ions and Ca ions, being alkaline earth metal ions contained in the adhesive layer is 10 ppm by mass or less. Consequently, a step with a uniform thickness can be formed, and a quartz glass plate is not easily damaged by irradiation with a light containing an ultraviolet ray.