Synthetic Quartz Imprint Mold Coating for Fracture Strength
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Solution Overview
Problem
Fine patterns on synthetic quartz glass imprint molds are prone to breakage due to low fracture strength, and existing solutions fail to provide effective protection against contamination and easy removal of coating layers.
Innovation Solution
A coating layer made of materials different from the synthetic quartz glass substrate, such as metals, inorganic oxides, or inorganic nitrides, is applied to the fine patterns, which can be easily removed and re-applied without damaging the mold, enhancing the fracture strength and durability of the patterns.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If synthetic quartz glass is used as the mold material to achieve high strength and dimensional stability, then the fracture strength is improved, but the fine patterns are still prone to breakage due to inherent material limitations
Solution Approach 1:
The patent applies composite materials by combining synthetic quartz glass substrate with a coating layer made of different material (such as metal, inorganic oxide, or inorganic nitride). This composite structure leverages the high strength and dimensional stability of synthetic quartz glass while the coating layer provides enhanced breakage resistance and protection against foreign matter, resolving the contradiction between material strength and pattern reliability.
Solution Approach 2:
The coating layer is applied specifically to the fine patterns on the mold surface rather than the entire mold. This local quality approach provides enhanced protection and strength exactly where it is needed - on the fine patterns - while maintaining the overall properties of the synthetic quartz glass substrate.
2Strength
If a coating layer is formed on the fine patterns to prevent breakage and contamination, then the fracture strength is improved, but the complexity of the mold structure increases
Solution Approach 1:
The patent uses a thin film coating layer applied to the fine patterns. This thin film approach provides the necessary protection and strength enhancement without adding significant structural complexity. The coating layer can be applied using standard deposition techniques and maintains a simple overall mold structure while providing the required functional improvement.
3Reliability
If the coating layer is made integral to the mold structure to ensure durability, then the reliability is improved, but the ease of maintenance and reproduction is reduced
Solution Approach 1:
The patent segments the mold structure into two distinct parts: the synthetic quartz glass substrate and the coating layer. This segmentation allows the coating layer to be independently applied, removed, and replaced without affecting the underlying substrate. The coating layer can be easily removed for maintenance or reproduction purposes while still providing durable protection during use, resolving the contradiction between reliability and ease of repair.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution significantly improves the fracture strength of the fine patterns, preventing breakage and allowing for easy maintenance and prolonged life of the imprint molds by ensuring high accuracy and reliability in the imprint process.
Implementation Method 1
a coating layer formed of a material different from the substrate is formed on at least a part of the fine pattern
Implementation Method 2
the coating layer is formed of a material different from the substrate by alternately exposing at least two kinds of reactive precursors serving as raw materials of a material different from the substrate to at least a part of the transfer fine pattern formed on the surface of the synthetic quartz glass substrate by sequential chemical vapor deposition to react these precursors
Data Source
AI summary
An imprint mold having a synthetic quartz glass substrate having a transfer fine pattern formed on a surface thereof; and a coating layer formed on at least a part of the fine pattern by at least one of materials different from the substrate.