Quartz Lid Gap Design for Heat Treatment Sealing
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Solution Overview
Problem
In vertical heat treatment apparatuses, the direct contact between a quartz reaction tube and a metal lid can lead to the generation of quartz particles and the introduction of corrosive gases through gaps, causing damage to metal parts and corrosion.
Innovation Solution
A heat treatment apparatus design featuring a cylindrical quartz reaction tube with a metal flange holding part and a lid comprising a metal lid and a quartz lid supported by a metal lid, where the quartz lid is fixed using a support ring to create a gap between the quartz lid and the reaction tube's bottom flange, with a sealing member positioned radially outward to prevent direct contact and corrosion.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the lid is brought into contact with the bottom flange of the reaction tube to seal the furnace opening, then the sealing effect is improved, but quartz particles are generated and may be introduced into the reaction tube
Solution Approach 1:
A sealing member (O-ring) is introduced as an intermediary element between the lid and the reaction tube. The sealing member deforms to fill the gap between the lid and the reaction tube, providing effective sealing without requiring direct contact between the lid and the reaction tube, thereby preventing quartz particle generation while maintaining sealing reliability
2Object-generated harmful factors
If a gap is formed between the reaction tube and the lid to prevent quartz particle generation, then quartz particle generation is prevented, but corrosive gas may be introduced through the gap causing corrosion of metal parts
Solution Approach 1:
The sealing member acts as an intermediary that fills the gap between the lid and the reaction tube. This allows a physical gap to exist (preventing quartz particle generation) while the sealing member blocks the gap from allowing corrosive gas penetration, thus resolving both harmful effects simultaneously
3Reliability
If the sealing member is compressed too much to ensure sealing, then the sealing effect is improved, but the sealing member may be damaged
Solution Approach 1:
The design optimizes the compression parameters of the sealing member by controlling the gap distance between the lid and the reaction tube. The support structure maintains a specific gap that allows the sealing member to deform sufficiently for effective sealing while preventing excessive compression that would damage the sealing member, thus balancing sealing effectiveness with component durability
Data Source
AI summary
Provided is a heat treatment apparatus, which includes: a cylindrical quartz reaction tube having a furnace opening and a bottom flange at a lower portion thereof; a flange holding part configured to hold the bottom flange of the reaction tube; and a lid including a metal lid and a quartz lid supported by the metal lid, the quartz lid being configured to close the furnace opening of the reaction tube. The quartz lid is fixed onto the metal lid by a support ring. The support ring is brought into contact with a bottom surface of the flange holding part so that a gap is defined between the quartz lid and the bottom flange. A sealing member is arranged outward from the gap in a radial direction.