Quartz Nozzle Fixing Block for Substrate Processing Apparatus
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Solution Overview
Problem
Existing substrate processing apparatuses face challenges in securely connecting and fixing nozzles made of quartz to reaction tubes also made of quartz without causing the nozzle to collapse.
Innovation Solution
A substrate processing method involving a gas introduction structure made of non-metallic material integrated with the process vessel, a nozzle with a specific L-shape configuration, and a fixing block with a groove to prevent radial movement, allowing secure attachment and prevention of nozzle collapse.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a nozzle made of non-metallic material is connected to a reaction tube made of non-metallic material, then material compatibility and chemical resistance are improved, but the nozzle may collapse due to insufficient structural support
Solution Approach 1:
The nozzle is divided into multiple sections: a first straight portion inserted into the gas introduction structure, and a second straight portion extending along the reaction tube inner wall. This segmentation allows each portion to be optimized independently for both chemical resistance and structural integrity.
Solution Approach 2:
A fixing block is introduced as an intermediary component between the nozzle and the reaction tube. The fixing block provides mechanical support to prevent nozzle collapse while maintaining the non-metallic material compatibility throughout the system.
2Stability of the object's composition
If the nozzle is securely fixed to prevent collapse, then structural stability is improved, but the nozzle replacement and evaluation become more difficult
Solution Approach 1:
The fixing block is designed with a groove that allows the nozzle to be movable in the radial direction. This dynamic design enables easy insertion and removal of the nozzle while maintaining stable positioning during operation, facilitating both structural stability and ease of replacement for evaluation purposes.
3Manufacturing precision
If the nozzle extends along the inner wall of the reaction tube, then gas distribution uniformity is improved, but the complexity of installation and alignment increases
Solution Approach 1:
The second straight portion of the nozzle is designed to extend along the inner wall of the reaction tube, creating a uniform positioning relationship. This equipotential arrangement simplifies alignment during installation while ensuring uniform gas distribution to the substrate surface.
Data Source
AI summary
A technique for connecting a nozzle to a reaction tube while preventing the nozzle from collapsing includes a substrate processing apparatus including: a gas introduction structure comprising a non-metallic material penetrating a side wall of a process vessel and integrated with the side wall as a single structure, wherein a front end thereof protrudes into the process vessel; a nozzle made of a non-metallic material and including: a first straight portion inserted into the gas introduction structure and fluidically communicating with the gas introduction structure; and a second straight portion fluidically communicating with the first straight portion and extending along an inner wall of the process vessel; and a fixing block provided at an inner side of the process vessel and above the gas introduction structure, wherein the fixing block has a groove where the nozzle can be moved in a radial direction of the process vessel.