Quartz Nozzle Fixing Structure to Prevent Reaction Tube Collapse
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Solution Overview
Problem
The challenge is to connect and fix a nozzle made of quartz to a quartz reaction tube without causing the nozzle to collapse, which is essential for maintaining the integrity and functionality of the substrate processing apparatus in semiconductor device manufacturing.
Innovation Solution
A substrate processing apparatus is designed with a gas introduction structure and a nozzle configuration where the nozzle has a first straight portion inserted into the gas introduction structure and a second straight portion extending along the inner wall, with a fixing block providing a groove for radial movement, allowing secure attachment without collapsing. The gas introduction structure and nozzle are made of non-metallic materials like quartz and silicon carbide, and the fixing block includes a groove for radial positioning, ensuring stability and preventing detachment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If a nozzle made of non-metallic material is inserted into a gas introduction structure, then the nozzle can be connected to the reaction tube, but the nozzle may collapse due to lack of structural support
Solution Approach 1:
The nozzle is nested within the gas introduction structure, with the nozzle inserted into the hollow cylindrical gas introduction structure. The fixing block is then inserted into the nozzle from the rear, creating a nested configuration where each component provides support to the others, preventing nozzle collapse while maintaining the connection
2Strength
If the nozzle is fixed securely to prevent collapse, then structural integrity is maintained, but the nozzle becomes difficult to replace for evaluation or maintenance
Solution Approach 1:
The fixing block is designed as a separate, removable component that can be independently inserted and extracted. This segmentation allows the nozzle to be securely fixed during operation while enabling easy removal and replacement by simply extracting the fixing block, without requiring complex disassembly procedures
3Productivity
If the nozzle extends along the inner wall of the process vessel, then gas distribution is improved, but the nozzle becomes more susceptible to collapse without additional support
Solution Approach 1:
The gas introduction structure serves as an intermediary component between the nozzle and the reaction tube environment. This hollow cylindrical structure provides mechanical support to the nozzle along its length, preventing collapse while allowing the nozzle to maintain its extended configuration for effective gas distribution along the inner wall
Data Source
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AI summary
There is provided a technique capable of connecting and fixing a nozzle to a reaction tube while preventing the nozzle from collapsing. According to one aspect thereof, there is provided a substrate processing apparatus including: a gas introduction structure made of a non-metallic material, penetrating a side wall of a process vessel and integrated with the side wall as a single structure, wherein a front end thereof protrudes into the process vessel; a nozzle made of a non-metallic material and including: a first straight portion inserted into the gas introduction structure and fluidically communicating with the gas introduction structure; and a second straight portion fluidically communicating with the first straight portion and extending along an inner wall of the process vessel; and a fixing block provided at an inner side of the side wall of the process vessel and above the gas introduction structure, wherein the fixing block is provided with a groove in which the nozzle is capable of being moved in a radial direction of the process vessel.