Quartz Nozzle Radial Buffer for Particle Prevention
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Solution Overview
Problem
In substrate processing apparatuses, the gap between quartz gas supply nozzles and metal nozzle support members can lead to particle generation due to gas mixing and direct contact, causing contamination and nozzle breakage.
Innovation Solution
A connection structure using a nozzle with an attaching portion and a nozzle adapter with annular buffer members that compress and deform radially, creating a clearance fit to prevent direct contact and particle generation, while maintaining airtightness.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the quartz nozzle and metal nozzle support member are fitted to each other, then the nozzle can be supported and positioned, but a slight gap is formed between the quartz and metal causing particle generation due to gas mixing and direct contact
Solution Approach 1:
An intermediate member is introduced between the quartz nozzle and the metal nozzle support member to prevent direct contact. This intermediate component acts as a mediator that eliminates the harmful direct interface while maintaining the structural support function, thereby preventing particle generation from both contact and gas mixing through the gap.
Solution Approach 2:
A flexible sealing member (such as an O-ring) is used to fill the gap between the quartz nozzle and metal support member. This flexible element maintains airtightness while preventing direct contact between the rigid quartz and metal components, eliminating the source of particle generation while preserving structural stability.
2Reliability
If the quartz nozzle and metal nozzle support member are fitted to each other, then the nozzle can be held in position, but direct contact causes breakage of the nozzle due to rubbing between quartz and metal
Solution Approach 1:
The intermediate sealing member serves as a protective mediator that prevents direct mechanical contact between the fragile quartz nozzle and the metal support member. This eliminates rubbing and friction that would otherwise lead to nozzle breakage, while still maintaining proper positioning and support.
Solution Approach 2:
The flexible sealing member is pre-installed between the quartz and metal components to provide cushioning and protection before any contact occurs. This preventive measure absorbs mechanical stresses and prevents direct transmission of forces that could cause nozzle breakage.
3Adaptability or versatility
If a gap is formed between the quartz nozzle and metal support member, then thermal expansion differences can be accommodated, but gas other than processing gas mixes into the nozzle through the gap causing particle generation
Solution Approach 1:
A flexible sealing member is used to close the gap between the quartz nozzle and metal support member while accommodating thermal expansion movements. This flexible seal maintains airtightness during thermal cycles, preventing processing gas leakage and contamination while allowing for dimensional changes due to temperature variations.
Solution Approach 2:
The sealing member is designed to accommodate thermal expansion of the quartz nozzle relative to the metal support member. The flexible material allows for differential thermal movement while maintaining the seal, thus preventing gas mixing and particle generation while adapting to temperature changes.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Prevents particle generation and nozzle breakage by ensuring no direct contact between the quartz nozzle and metal adapter, improving airtightness and reducing contamination risks during substrate processing.
Implementation Method 1
at least one of the annular buffer members is compressed and deformed in a radial direction of the corresponding annular buffer member
Implementation Method 2
abuts on the nozzle adapter
Data Source
AI summary
A technique makes it possible to prevent direct contact between a nozzle outer periphery and a nozzle adapter and to prevent generation of particles due to the direct contact. The technique includes: a nozzle that has an attaching portion formed on one end and discharges, into a processing chamber, a gas supplied to the attaching portion; a nozzle adapter that is disposed in the processing chamber and is clearance-fitted to an outer peripheral surface of the attaching portion with a predetermined gap; and a plurality of annular buffer members that is disposed in the attaching portion and abuts on the nozzle adapter, in which at least one of the annular buffer members is compressed and deformed in a radial direction of the corresponding annular buffer member in a state where the attaching portion of the nozzle is attached to the nozzle adapter.