Quartz Reactor Casing Assembly Without Tube Welding
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Solution Overview
Problem
The welding of concentric quartz tubes for reactor enclosures in epitaxial deposition systems is unreliable, leading to structural damage and increased manufacturing costs, with artisanal processes resulting in unpredictable yields.
Innovation Solution
A casing assembly comprising a quartz inner and outer casing connected by engineering plastic flanges, creating a liquid-tight interspace for cooling fluid circulation, which includes inlets and outlets for efficient cooling and avoids the need for welding, using engineering plastics like polypropylene and O-rings for sealing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If welding is used to join concentric quartz tubes, then the enclosure can be formed, but the welding process damages the tubes and increases manufacturing costs
Solution Approach 1:
The enclosure is divided into separate inner and outer quartz tubes that are joined through the interspace using welding--free connection methods. This segmentation allows each tube to be manufactured independently and assembled without direct welding, preserving tube integrity while forming the complete enclosure structure.
Solution Approach 2:
A welding-free joining mechanism acts as an intermediary between the inner and outer quartz tubes. This intermediary connection system enables the tubes to be joined without direct welding contact, thereby avoiding the damage and cost issues associated with traditional welding while maintaining structural integrity.
2Ease of manufacture
If welding is used to join concentric quartz tubes, then the enclosure can be formed, but the artisanal welding process creates unpredictable yields and increases costs
Solution Approach 1:
The artisanal welding process is replaced with a mechanical joining system that does not require welding. This substitution eliminates the unpredictability and cost issues of welding while providing a more reliable and scalable manufacturing process with consistent yields.
Solution Approach 2:
By segmenting the enclosure into separate tubes joined through the interspace, the manufacturing process becomes more standardized and predictable. Each tube can be manufactured independently with consistent quality, and the assembly process is more reliable than artisanal welding, thereby improving productivity and yield.
3Reliability
If quartz tubes are used for the enclosure, then the chamber can be protected from contamination and withstand high temperatures, but the tubes require welding which damages them
Solution Approach 1:
A welding-free joining mechanism serves as an intermediary that connects the quartz tubes without damaging them. This intermediary system maintains the protective qualities of the quartz tubes while enabling reliable assembly, eliminating the need for damaging welding processes.
Solution Approach 2:
The enclosure is segmented into separate quartz tubes that are joined through the interspace without welding. This segmentation preserves the integrity and protective properties of the quartz material while providing a manufacturable assembly process that does not damage the tubes.
4Reliability
If concentric quartz tubes are welded together, then a liquid-tight enclosure is formed, but the process is unreliable and costly
Solution Approach 1:
The liquid-tight enclosure is formed by segmenting the structure into inner and outer tubes joined through the interspace. This segmentation allows for reliable sealing without welding, as the joining mechanism can be designed to ensure both liquid-tightness and manufacturing reliability simultaneously.
Solution Approach 2:
A welding-free intermediary joining system provides both liquid-tight sealing and manufacturing reliability. This intermediary mechanism ensures that the connection between tubes is both seal-effective and reliably manufacturable, eliminating the drawbacks of welding while maintaining both requirements.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution provides a cost-effective, efficient, and reliable enclosure for epitaxial deposition reactors, ensuring uniform cooling and mechanical stability at high temperatures, reducing manufacturing issues and costs.
Implementation Method 1
a first flange and a second flange of engineering plastic material connecting the inner and the outer casing and creating a liquid-tight interspace between them. Said first flange comprises at least one inlet for directing a cooling fluid in said liquid-tight interspace
Implementation Method 2
These temperatures may be achieved via an induction heating system, for example comprising an induction coil wrapped around the reaction chamber and connected to a power generation circuit. In this case, the chamber may comprise one or more thermally conductive elements, such as an assembly of one or more graphite pieces. Indeed, graphite features high susceptivity and will heat up effectively under an alternating electromagnetic field.
Data Source
Figure 1a~1b
Figure 2
Figure 3
AI summary
The present invention relates to a casing assembly of a reactor for the epitaxial deposition of semiconductor films on a substrate. The casing assembly comprises an inner and an outer casing made of quartz and connected by at least two flanges made of engineering plastics. The invention also relates to a reaction chamber enclosed by said casing assembly, and a reactor employing at least one of said reaction chambers.